Abstract
An approach improving diamond–metal adhesion has been developed based on modeling predictions and experimental verifications on the interfacial stresses modified by catalytic reaction. It is found that N-plasma irradiating onto Ti and tungsten-carbide substrates generates tensile surface stresses while C-plasma irradiation creates strongly compressive stress at the surfaces, both of which deteriorate the diamond–metal adhesion. It is also found that surface oxidation prevents diamondnucleation. Therefore, we applied a graded TiCN interlayer with carefully adjusting the ratio of C and N in the gas mixture to neutralize the interfacial stress and, hence, we have improved the diamond–metal adhesion substantially.
| Original language | English |
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| Pages (from-to) | 2051 |
| Journal | Journal of Applied Physics |
| Volume | 91 |
| Issue number | 4 |
| DOIs | |
| Publication status | Published - 2002 |