Improving the deposition rate of multicomponent coating by controlling substrate table rotation in a magnetron sputtering process

Julfikar Haider; Mohammed Hashmi

Improving the deposition rate of multicomponent coating by controlling substrate table rotation in a magnetron sputtering process

Julfikar Haider, Mohammed Hashmi

Northumbria University

Research output: Contribution to conference › Paper › peer-review

Original language	English
Publication status	Published - 2008
Event	International Conference on Advances in Materials and Processing Technologies (AMPT 2008) - Bahrain Duration: 1 Jan 2008 → …

Conference

Conference	International Conference on Advances in Materials and Processing Technologies (AMPT 2008)
Period	1/01/08 → …

Cite this

@conference{f56a47f478b244e6b6e11c15f449203b,

title = "Improving the deposition rate of multicomponent coating by controlling substrate table rotation in a magnetron sputtering process",

author = "Julfikar Haider and Mohammed Hashmi",

note = "Submitted for publication in Journal of Surface and Coatings Technology, November 2008.; International Conference on Advances in Materials and Processing Technologies (AMPT 2008) ; Conference date: 01-01-2008",

year = "2008",

language = "English",

}

TY - CONF

T1 - Improving the deposition rate of multicomponent coating by controlling substrate table rotation in a magnetron sputtering process

AU - Haider, Julfikar

AU - Hashmi, Mohammed

N1 - Submitted for publication in Journal of Surface and Coatings Technology, November 2008.

PY - 2008

Y1 - 2008

M3 - Paper

T2 - International Conference on Advances in Materials and Processing Technologies (AMPT 2008)

Y2 - 1 January 2008

ER -