In-situ Stress Monitoring with a Laser-Fibre System

Vincent Barrioz; Stuart Irvine; D. P. Jones

doi:10.1002/1527-2648(20020806)4:8<550::AID-ADEM550>3.0.CO;2-Q

In-situ Stress Monitoring with a Laser-Fibre System

Vincent Barrioz, Stuart Irvine, D. P. Jones

Mathematics, Physics and Electrical Engineering

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Abstract

A novel laser-fibre system is used for in-situ stress monitoring of thin film deposition on a glass substrate. The authors have shown that it could also be used to monitor the temperature of the substrate, as well as the thickness of the growing layer, using the thin film interference equation. Single layers of ZnS and YF3 optical coatings have been evaporated onto borosilicate glass, doped with cerium oxide, in the environment of a high vacuum (HV) chamber. The results obtained show that the novel laser-fibre system used as a stress monitor can give insights into the causes of thin film residual stress in vacuum evaporation.

Original language	English
Pages (from-to)	550-554
Journal	Advanced Engineering Materials
Volume	4
Issue number	8
DOIs	https://doi.org/10.1002/1527-2648(20020806)4:8<550::AID-ADEM550>3.0.CO;2-Q
Publication status	Published - Aug 2002

Keywords

In-situ stress measurement
Laser-fibre system
Yttrium fluoride
Zinc sulfide

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10.1002/1527-2648(20020806)4:8<550::AID-ADEM550>3.0.CO;2-Q

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title = "In-situ Stress Monitoring with a Laser-Fibre System",

abstract = "A novel laser-fibre system is used for in-situ stress monitoring of thin film deposition on a glass substrate. The authors have shown that it could also be used to monitor the temperature of the substrate, as well as the thickness of the growing layer, using the thin film interference equation. Single layers of ZnS and YF3 optical coatings have been evaporated onto borosilicate glass, doped with cerium oxide, in the environment of a high vacuum (HV) chamber. The results obtained show that the novel laser-fibre system used as a stress monitor can give insights into the causes of thin film residual stress in vacuum evaporation.",

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AU - Jones, D. P.

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AB - A novel laser-fibre system is used for in-situ stress monitoring of thin film deposition on a glass substrate. The authors have shown that it could also be used to monitor the temperature of the substrate, as well as the thickness of the growing layer, using the thin film interference equation. Single layers of ZnS and YF3 optical coatings have been evaporated onto borosilicate glass, doped with cerium oxide, in the environment of a high vacuum (HV) chamber. The results obtained show that the novel laser-fibre system used as a stress monitor can give insights into the causes of thin film residual stress in vacuum evaporation.

KW - In-situ stress measurement

KW - Laser-fibre system

KW - Yttrium fluoride

KW - Zinc sulfide

U2 - 10.1002/1527-2648(20020806)4:8<550::AID-ADEM550>3.0.CO;2-Q

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JO - Advanced Engineering Materials

JF - Advanced Engineering Materials

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ER -

In-situ Stress Monitoring with a Laser-Fibre System

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Keywords

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