Integrated Sensing and Actuation Capabilities of Flexible Surface Acoustic Wave Devices with Metallic and Polymer Layers

Shahrzad Zahertar*, Ran Tao, Hamdi Torun, Pep Canyelles-Pericas, Yong Qing Fu

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Flexible and bendable devices have become the key elements in the development of next-generation point-of-care systems and wearable technologies. In this paper, we report flexible surface acoustic wave (SAW) devices that are composed of a multilayer substrate; SAW devices are basically made of interdigital transducers (IDTs) that are patterned on a piezoelectric layer. In our fabricated devices, thin film of zinc oxide (ZnO), as the piezoelectric layer, is deposited on substrates made of trilayer of thin metal films (Nickel/Copper/Nickel) on top of a polyethylene terephthalate (PET) layer. We have characterized the devices in radio frequencies, and we have measured the response of the device to the temperature and the Ultraviolet (UV) light. Also, we have tested the actuation capability of our fabricated devices. We have successfully demonstrated that our fabricated devices can be employed as an integrated platform for sensing and actuation purposes using a single structure.

Original languageEnglish
Title of host publicationFLEPS 2021 - IEEE International Conference on Flexible and Printable Sensors and Systems
Place of PublicationPiscataway, NJ
PublisherInstitute of Electrical and Electronics Engineers Inc.
Number of pages4
ISBN (Electronic)9781728191737
ISBN (Print)9781728191744
DOIs
Publication statusPublished - 20 Jun 2021
Event2021 IEEE International Conference on Flexible and Printable Sensors and Systems, FLEPS 2021 - Virtual, Online
Duration: 20 Jun 202123 Jun 2021

Publication series

NameFLEPS 2021 - IEEE International Conference on Flexible and Printable Sensors and Systems

Conference

Conference2021 IEEE International Conference on Flexible and Printable Sensors and Systems, FLEPS 2021
CityVirtual, Online
Period20/06/2123/06/21

Fingerprint

Dive into the research topics of 'Integrated Sensing and Actuation Capabilities of Flexible Surface Acoustic Wave Devices with Metallic and Polymer Layers'. Together they form a unique fingerprint.

Cite this