TY - GEN
T1 - Integrated Sensing and Actuation Capabilities of Flexible Surface Acoustic Wave Devices with Metallic and Polymer Layers
AU - Zahertar, Shahrzad
AU - Tao, Ran
AU - Torun, Hamdi
AU - Canyelles-Pericas, Pep
AU - Fu, Yong Qing
N1 - Funding Information:
ACKNOWLEDGMENT The This work was supported by the Engineering Physics and Science Research Council of UK (EPSRC EP/P018998/1) and UK Fluidic Network (EP/N032861/1) - Special Interest Group of Acoustofluidics.
PY - 2021/6/20
Y1 - 2021/6/20
N2 - Flexible and bendable devices have become the key elements in the development of next-generation point-of-care systems and wearable technologies. In this paper, we report flexible surface acoustic wave (SAW) devices that are composed of a multilayer substrate; SAW devices are basically made of interdigital transducers (IDTs) that are patterned on a piezoelectric layer. In our fabricated devices, thin film of zinc oxide (ZnO), as the piezoelectric layer, is deposited on substrates made of trilayer of thin metal films (Nickel/Copper/Nickel) on top of a polyethylene terephthalate (PET) layer. We have characterized the devices in radio frequencies, and we have measured the response of the device to the temperature and the Ultraviolet (UV) light. Also, we have tested the actuation capability of our fabricated devices. We have successfully demonstrated that our fabricated devices can be employed as an integrated platform for sensing and actuation purposes using a single structure.
AB - Flexible and bendable devices have become the key elements in the development of next-generation point-of-care systems and wearable technologies. In this paper, we report flexible surface acoustic wave (SAW) devices that are composed of a multilayer substrate; SAW devices are basically made of interdigital transducers (IDTs) that are patterned on a piezoelectric layer. In our fabricated devices, thin film of zinc oxide (ZnO), as the piezoelectric layer, is deposited on substrates made of trilayer of thin metal films (Nickel/Copper/Nickel) on top of a polyethylene terephthalate (PET) layer. We have characterized the devices in radio frequencies, and we have measured the response of the device to the temperature and the Ultraviolet (UV) light. Also, we have tested the actuation capability of our fabricated devices. We have successfully demonstrated that our fabricated devices can be employed as an integrated platform for sensing and actuation purposes using a single structure.
KW - Microfluidic Actuation
KW - Surface Acoustic Waves
UR - https://www.scopus.com/pages/publications/85114127046
U2 - 10.1109/FLEPS51544.2021.9469755
DO - 10.1109/FLEPS51544.2021.9469755
M3 - Conference contribution
AN - SCOPUS:85114127046
SN - 9781728191744
T3 - FLEPS 2021 - IEEE International Conference on Flexible and Printable Sensors and Systems
BT - FLEPS 2021 - IEEE International Conference on Flexible and Printable Sensors and Systems
PB - IEEE
CY - Piscataway, NJ
T2 - 2021 IEEE International Conference on Flexible and Printable Sensors and Systems, FLEPS 2021
Y2 - 20 June 2021 through 23 June 2021
ER -