Integration of IC technology with MEMS: silicon+ technology for the future

Anthony Walton, Tom Stevenson, Ian Underwood, Jonathan Terry, S. Smith, William Parkes, Camelia Dunare, H. Lin, Yifan Li, Robert Henderson, David Renshaw, K. Muir, Marc Desmulliez, David Flynn, Mike MacIntosh, Wayne Holland, Alan Murray, Tong Boon Tang, Andrew Bunting, A. M. Gundlach

Research output: Contribution to conferencePaperpeer-review

3 Citations (Scopus)

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Computer Science

Engineering

Material Science