Large Surface Strain Sensing Structures based on Elastic Instabilities

Yifan Li; Glen McHale; S. Smith; Anthony Walton; Ben Xu

Large Surface Strain Sensing Structures based on Elastic Instabilities

Yifan Li, Glen McHale, S. Smith, Anthony Walton, Ben Xu

Research output: Contribution to conference › Other

Abstract

Sensing large strain using a mechanically actuated switch gate and a variable resistor surface creasing test structure is reported. Test structures with different gate and interconnect/wiring geometries have been designed, fabricated and characterised. They respond to designed strain values with a reduction in device resistivity of 11 to 12 orders of magnitude. Results from strain measurements ranging from 0.2 to 0.6 are reported for test structures with electrode spaces of 10 to 60 μm.

Original language	English
Publication status	Published - Mar 2015
Event	International Conference on Microelectronic Test Structures (ICMTS) - Tempe, Arizona, US Duration: 1 Mar 2015 → … http://icmts2015.pdf.com/

Conference

Conference	International Conference on Microelectronic Test Structures (ICMTS)
Period	1/03/15 → …
Internet address	http://icmts2015.pdf.com/

Cite this

@conference{9674d51de2fd4a2787b347f169b14472,

title = "Large Surface Strain Sensing Structures based on Elastic Instabilities",

abstract = "Sensing large strain using a mechanically actuated switch gate and a variable resistor surface creasing test structure is reported. Test structures with different gate and interconnect/wiring geometries have been designed, fabricated and characterised. They respond to designed strain values with a reduction in device resistivity of 11 to 12 orders of magnitude. Results from strain measurements ranging from 0.2 to 0.6 are reported for test structures with electrode spaces of 10 to 60 μm.",

author = "Yifan Li and Glen McHale and S. Smith and Anthony Walton and Ben Xu",

year = "2015",

month = mar,

language = "English",

note = "International Conference on Microelectronic Test Structures (ICMTS) ; Conference date: 01-03-2015",

url = "http://icmts2015.pdf.com/",

}

TY - CONF

T1 - Large Surface Strain Sensing Structures based on Elastic Instabilities

AU - Li, Yifan

AU - McHale, Glen

AU - Smith, S.

AU - Walton, Anthony

AU - Xu, Ben

PY - 2015/3

Y1 - 2015/3

N2 - Sensing large strain using a mechanically actuated switch gate and a variable resistor surface creasing test structure is reported. Test structures with different gate and interconnect/wiring geometries have been designed, fabricated and characterised. They respond to designed strain values with a reduction in device resistivity of 11 to 12 orders of magnitude. Results from strain measurements ranging from 0.2 to 0.6 are reported for test structures with electrode spaces of 10 to 60 μm.

AB - Sensing large strain using a mechanically actuated switch gate and a variable resistor surface creasing test structure is reported. Test structures with different gate and interconnect/wiring geometries have been designed, fabricated and characterised. They respond to designed strain values with a reduction in device resistivity of 11 to 12 orders of magnitude. Results from strain measurements ranging from 0.2 to 0.6 are reported for test structures with electrode spaces of 10 to 60 μm.

M3 - Other

T2 - International Conference on Microelectronic Test Structures (ICMTS)

Y2 - 1 March 2015

ER -

Large Surface Strain Sensing Structures based on Elastic Instabilities

Abstract

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