Laser micromachining of sputtered DLC films

Yong Qing Fu, J. K. Luo, Andrew Flewitt, Soon-Eng Ong, Sam Zhang, William Milne

Research output: Contribution to journalArticlepeer-review

11 Citations (Scopus)

Abstract

DLC films with different thicknesses (from 100 nm to 1.9 μm) were deposited using sputtering of graphite target in pure argon atmosphere without substrate heating. Film microstructures (sp2/sp3 ratio) and mechanical properties (modulus, hardness, stress) were characterized as a function of film thickness. A thin layer of aluminum about 60 nm was deposited on the DLC film surface. Laser micromachining of Al/DLC layer was performed to form microcantilever structures, which were released using a reactive ion etching system with SF6 plasma. Due to the intrinsic stress in DLC films and bimorph Al/DLC structure, the microcantilevers bent up with different curvatures. For DLC film of 100 nm thick, the cantilever even formed microtubes. The relationship between the bimorph beam bending and DLC film properties (such as stress, modulus, etc.) were discussed in details.
Original languageEnglish
Pages (from-to)4914-4918
JournalApplied Surface Science
Volume252
Issue number13
DOIs
Publication statusPublished - 30 Apr 2006

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