Abstract
Experimental data are presented for an acoustic wave sensor based on a layer-guided shear acoustic plate mode excited on a thin quartz substrate. The effect of coating the front and back faces with polymer waveguiding layers is shown to convert the plate modes into layer-guided plate modes in a manner analogous to Love waves and to produce a similar enhancement of mass sensitivity. These layer-guided plate mode devices offer the possibility of liquid-phase sensing with transducers situated on the face of the substrate isolated from the liquid, while offering a mass sensitivity comparable to a Love wave device.
| Original language | English |
|---|---|
| Pages (from-to) | 2181-2183 |
| Journal | Applied Physics Letters |
| Volume | 82 |
| Issue number | 13 |
| DOIs | |
| Publication status | Published - 31 Mar 2003 |
Keywords
- shear horizontal
- Love wave
- sensor