Lithium tantalate layer guided plate mode sensors

Carl Evans, Simon Stanley, Carl Percival, Glen McHale, Michael Newton

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

Abstract

Wafers of lithium tantalate have been lapped and polished prior to the fabrication of interdigital transducers (IDT). The effect of building up successive polymer layers is reported for both the surface containing the IDT and the opposite face. The data demonstrates the ability of lithium tantalate to support layer guided plate mode; such acoustic wave sensors allow fabrication of the transducers on the opposite face to the sensing surface. In addition, the sensitivity to thin gold films deposited on the guiding layers both on the IDT and opposite faces is reported.
Original languageEnglish
Pages (from-to)241-244
JournalSensors and Actuators A: Physical
Volume132
Issue number1
DOIs
Publication statusPublished - 8 Nov 2006

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