Love-mode surface acoustic wave devices based on multilayers of TeO2/ZnO(1120)/Si(100) with high sensitivity and temperature stability

Jing-Ting Luo, Ao-Jie Quan, Guang-Xing Liang, Zhuang-Hao Zheng, Sami Ramadan, Chen Fu, Hong-Lang Li, Yong Qing Fu

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    Physics