Magnetron sputtering of nanocomposite (Ti,Cr)CN/DLC coatings

Sam Zhang; Yong Qing Fu; Hejun Du; X. T. Zeng; Y. C. Liu

doi:10.1016/S0257-8972(02)00561-3

Magnetron sputtering of nanocomposite (Ti,Cr)CN/DLC coatings

Sam Zhang, Yong Qing Fu, Hejun Du, X. T. Zeng, Y. C. Liu

Mathematics, Physics and Electrical Engineering

Research output: Contribution to journal › Article › peer-review

109 Citations (Scopus)

Abstract

Superhard nanocrystalline (Ti, Cr)CN/DLC coatings were prepared through co-sputtering of Ti, Cr and graphite targets in an argon/nitrogen atmosphere. Results from both transmission electron microscopy (TEM) and grazing incident X-ray diffraction (GIXRD) indicated that the grain size of (TiCr)CxNy crystals was approximately 10–20 nm. X-ray photoelectron spectroscopic studies confirmed that an increase in the sputtering power at the Ti target not only increased the Ti composition in the film but also brought about an increase in sp3 bonding in DLC matrix, in agreement with the raising hardness with Ti sputtering power. Film hardness and elastic modulus were measured with a nano-indenter, and film hardness reached 40 GPa. Tribological behaviors of the films were evaluated using a ball-on-disk tribometer, and the films demonstrated properties of low-friction and good wear resistance.

Original language	English
Pages (from-to)	42-48
Journal	Surface and Coatings Technology
Volume	162
Issue number	1
DOIs	https://doi.org/10.1016/S0257-8972(02)00561-3
Publication status	Published - 1 Jan 2003

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title = "Magnetron sputtering of nanocomposite (Ti,Cr)CN/DLC coatings",

abstract = "Superhard nanocrystalline (Ti, Cr)CN/DLC coatings were prepared through co-sputtering of Ti, Cr and graphite targets in an argon/nitrogen atmosphere. Results from both transmission electron microscopy (TEM) and grazing incident X-ray diffraction (GIXRD) indicated that the grain size of (TiCr)CxNy crystals was approximately 10–20 nm. X-ray photoelectron spectroscopic studies confirmed that an increase in the sputtering power at the Ti target not only increased the Ti composition in the film but also brought about an increase in sp3 bonding in DLC matrix, in agreement with the raising hardness with Ti sputtering power. Film hardness and elastic modulus were measured with a nano-indenter, and film hardness reached 40 GPa. Tribological behaviors of the films were evaluated using a ball-on-disk tribometer, and the films demonstrated properties of low-friction and good wear resistance.",

keywords = "Nanocomposite coating, Diamond-like carbon, (Ti, Cr)N, Sputtering, Tribology, Wear, Coefficient of friction",

author = "Sam Zhang and Fu, {Yong Qing} and Hejun Du and Zeng, {X. T.} and Liu, {Y. C.}",

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TY - JOUR

T1 - Magnetron sputtering of nanocomposite (Ti,Cr)CN/DLC coatings

AU - Zhang, Sam

AU - Fu, Yong Qing

AU - Du, Hejun

AU - Zeng, X. T.

AU - Liu, Y. C.

PY - 2003/1/1

Y1 - 2003/1/1

N2 - Superhard nanocrystalline (Ti, Cr)CN/DLC coatings were prepared through co-sputtering of Ti, Cr and graphite targets in an argon/nitrogen atmosphere. Results from both transmission electron microscopy (TEM) and grazing incident X-ray diffraction (GIXRD) indicated that the grain size of (TiCr)CxNy crystals was approximately 10–20 nm. X-ray photoelectron spectroscopic studies confirmed that an increase in the sputtering power at the Ti target not only increased the Ti composition in the film but also brought about an increase in sp3 bonding in DLC matrix, in agreement with the raising hardness with Ti sputtering power. Film hardness and elastic modulus were measured with a nano-indenter, and film hardness reached 40 GPa. Tribological behaviors of the films were evaluated using a ball-on-disk tribometer, and the films demonstrated properties of low-friction and good wear resistance.

AB - Superhard nanocrystalline (Ti, Cr)CN/DLC coatings were prepared through co-sputtering of Ti, Cr and graphite targets in an argon/nitrogen atmosphere. Results from both transmission electron microscopy (TEM) and grazing incident X-ray diffraction (GIXRD) indicated that the grain size of (TiCr)CxNy crystals was approximately 10–20 nm. X-ray photoelectron spectroscopic studies confirmed that an increase in the sputtering power at the Ti target not only increased the Ti composition in the film but also brought about an increase in sp3 bonding in DLC matrix, in agreement with the raising hardness with Ti sputtering power. Film hardness and elastic modulus were measured with a nano-indenter, and film hardness reached 40 GPa. Tribological behaviors of the films were evaluated using a ball-on-disk tribometer, and the films demonstrated properties of low-friction and good wear resistance.

KW - Nanocomposite coating

KW - Diamond-like carbon

KW - (Ti

KW - Cr)N

KW - Sputtering

KW - Tribology

KW - Wear

KW - Coefficient of friction

U2 - 10.1016/S0257-8972(02)00561-3

DO - 10.1016/S0257-8972(02)00561-3

M3 - Article

SN - 0257-8972

SN - 1879-3347

VL - 162

SP - 42

EP - 48

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

IS - 1

ER -

Magnetron sputtering of nanocomposite (Ti,Cr)CN/DLC coatings

Abstract

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