Memory effect of Al-rich AlN films synthesized with rf magnetron sputtering

Yang Liu, Tu Pei Chen, P. Zhao, Sam Zhang, Steve Fung, Yong Qing Fu

Research output: Contribution to journalArticlepeer-review

33 Citations (Scopus)

Fingerprint Dive into the research topics of 'Memory effect of Al-rich AlN films synthesized with rf magnetron sputtering'. Together they form a unique fingerprint.

Physics & Astronomy