MEMS-based terahertz detectors

H. Bilgin; A. D. Yalcinkaya; H. Torun

doi:10.1016/j.proeng.2015.08.556

MEMS-based terahertz detectors

H. Bilgin^*, A. D. Yalcinkaya, H. Torun

^*Corresponding author for this work

Research output: Contribution to journal › Conference article › peer-review

2 Citations (Scopus)

4 Downloads (Pure)

Abstract

A MEMS based novel THz detector structure is designed and realized by micro fabrication. The detector is then characterized to extract its mechanical performance. Operating in 1-5 THz band, the detector has a pixel size of 200 μm × 200 μm. Bimaterial suspension legs consist of Parylene-C and titanium, the pair of which provides a high mismatch in coefficients of thermal expansion. The pixel is a suspended Parylene-C structure having a 200 nm-thick titanium metallization. Operation principle relies on conversion of absorbed THz radiation into heat energy on the pixel. This increases the temperature of the free-standing microstructure that is thermally isolated from the substrate. The increase in temperature induces mechanical deflection due to bimaterial springs. The detector is designed to deliver a noise equivalent temperature difference (NETD) less than 500 mK and a refresh rate of 30Hz.

Original language	English
Pages (from-to)	15-19
Number of pages	5
Journal	Procedia Engineering
Volume	120
Early online date	11 Sep 2015
DOIs	https://doi.org/10.1016/j.proeng.2015.08.556
Publication status	Published - 2015
Externally published	Yes
Event	29th European Conference on Solid-State Transducers, EUROSENSORS 2015; Freiburg; Germany; 6 September 2015 through 9 September 2015. - Freiburg, Germany Duration: 6 Sep 2015 → 9 Sep 2015

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10.1016/j.proeng.2015.08.556Licence: CC BY-NC-ND

1-s2.0-S1877705815022195-mainFinal published version, 1.08 MBLicence: CC BY-NC-ND

Cite this

@article{332046cfdee746b0a607e361db22c32b,

title = "MEMS-based terahertz detectors",

abstract = "A MEMS based novel THz detector structure is designed and realized by micro fabrication. The detector is then characterized to extract its mechanical performance. Operating in 1-5 THz band, the detector has a pixel size of 200 μm × 200 μm. Bimaterial suspension legs consist of Parylene-C and titanium, the pair of which provides a high mismatch in coefficients of thermal expansion. The pixel is a suspended Parylene-C structure having a 200 nm-thick titanium metallization. Operation principle relies on conversion of absorbed THz radiation into heat energy on the pixel. This increases the temperature of the free-standing microstructure that is thermally isolated from the substrate. The increase in temperature induces mechanical deflection due to bimaterial springs. The detector is designed to deliver a noise equivalent temperature difference (NETD) less than 500 mK and a refresh rate of 30Hz.",

keywords = "Detectors, MEMS, Metamaterials, Optical readout, Terahertz technology",

author = "H. Bilgin and Yalcinkaya, {A. D.} and H. Torun",

year = "2015",

doi = "10.1016/j.proeng.2015.08.556",

language = "English",

volume = "120",

pages = "15--19",

journal = "Procedia Engineering",

issn = "1877-7058",

publisher = "Elsevier",

note = "29th European Conference on Solid-State Transducers, EUROSENSORS 2015; Freiburg; Germany; 6 September 2015 through 9 September 2015. ; Conference date: 06-09-2015 Through 09-09-2015",

}

TY - JOUR

T1 - MEMS-based terahertz detectors

AU - Bilgin, H.

AU - Yalcinkaya, A. D.

AU - Torun, H.

PY - 2015

Y1 - 2015

N2 - A MEMS based novel THz detector structure is designed and realized by micro fabrication. The detector is then characterized to extract its mechanical performance. Operating in 1-5 THz band, the detector has a pixel size of 200 μm × 200 μm. Bimaterial suspension legs consist of Parylene-C and titanium, the pair of which provides a high mismatch in coefficients of thermal expansion. The pixel is a suspended Parylene-C structure having a 200 nm-thick titanium metallization. Operation principle relies on conversion of absorbed THz radiation into heat energy on the pixel. This increases the temperature of the free-standing microstructure that is thermally isolated from the substrate. The increase in temperature induces mechanical deflection due to bimaterial springs. The detector is designed to deliver a noise equivalent temperature difference (NETD) less than 500 mK and a refresh rate of 30Hz.

AB - A MEMS based novel THz detector structure is designed and realized by micro fabrication. The detector is then characterized to extract its mechanical performance. Operating in 1-5 THz band, the detector has a pixel size of 200 μm × 200 μm. Bimaterial suspension legs consist of Parylene-C and titanium, the pair of which provides a high mismatch in coefficients of thermal expansion. The pixel is a suspended Parylene-C structure having a 200 nm-thick titanium metallization. Operation principle relies on conversion of absorbed THz radiation into heat energy on the pixel. This increases the temperature of the free-standing microstructure that is thermally isolated from the substrate. The increase in temperature induces mechanical deflection due to bimaterial springs. The detector is designed to deliver a noise equivalent temperature difference (NETD) less than 500 mK and a refresh rate of 30Hz.

KW - Detectors

KW - MEMS

KW - Metamaterials

KW - Optical readout

KW - Terahertz technology

U2 - 10.1016/j.proeng.2015.08.556

DO - 10.1016/j.proeng.2015.08.556

M3 - Conference article

AN - SCOPUS:84984945160

VL - 120

SP - 15

EP - 19

JO - Procedia Engineering

JF - Procedia Engineering

SN - 1877-7058

T2 - 29th European Conference on Solid-State Transducers, EUROSENSORS 2015; Freiburg; Germany; 6 September 2015 through 9 September 2015.

Y2 - 6 September 2015 through 9 September 2015

ER -

MEMS-based terahertz detectors

Abstract

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