MEMS-based terahertz detectors

H. Bilgin*, A. D. Yalcinkaya, H. Torun

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

2 Citations (Scopus)
11 Downloads (Pure)


A MEMS based novel THz detector structure is designed and realized by micro fabrication. The detector is then characterized to extract its mechanical performance. Operating in 1-5 THz band, the detector has a pixel size of 200 μm × 200 μm. Bimaterial suspension legs consist of Parylene-C and titanium, the pair of which provides a high mismatch in coefficients of thermal expansion. The pixel is a suspended Parylene-C structure having a 200 nm-thick titanium metallization. Operation principle relies on conversion of absorbed THz radiation into heat energy on the pixel. This increases the temperature of the free-standing microstructure that is thermally isolated from the substrate. The increase in temperature induces mechanical deflection due to bimaterial springs. The detector is designed to deliver a noise equivalent temperature difference (NETD) less than 500 mK and a refresh rate of 30Hz.

Original languageEnglish
Pages (from-to)15-19
Number of pages5
JournalProcedia Engineering
Early online date11 Sept 2015
Publication statusPublished - 2015
Externally publishedYes
Event29th European Conference on Solid-State Transducers, EUROSENSORS 2015; Freiburg; Germany; 6 September 2015 through 9 September 2015. - Freiburg, Germany
Duration: 6 Sept 20159 Sept 2015


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