MEMS bimaterial IR sensor array with AC-coupled optical readout

Ulas Adiyan, Fehmi Civitci, Onur Ferhanoglu, Hamdi Torun, Hakan Urey

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Citation (Scopus)

Abstract

This paper demonstrates a 35-μm pixel pitch MEMS thermal sensor array with optical-readout. We implemented an AC-coupled readout method for a single MEMS pixel using a photodetector, which responds only to changes in the scene. AC-coupled readout substantially reduced the optical noise by eliminating the large DC beam. This method can be scaled to achieve smart pixel cameras for read sensor arrays with low-noise and high dynamic range.

Original languageEnglish
Title of host publicationOMN 2015 - 2015 International Conference on Optical MEMS and Nanophotonics
PublisherIEEE
ISBN (Electronic)9781467368353
ISBN (Print)9781467368346
DOIs
Publication statusPublished - 5 Oct 2015
Externally publishedYes
EventInternational Conference on Optical MEMS and Nanophotonics, OMN 2015 - Jerusalem, Israel
Duration: 2 Aug 20155 Aug 2015

Conference

ConferenceInternational Conference on Optical MEMS and Nanophotonics, OMN 2015
CountryIsrael
CityJerusalem
Period2/08/155/08/15

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