This paper demonstrates a 35-μm pixel pitch MEMS thermal sensor array with optical-readout. We implemented an AC-coupled readout method for a single MEMS pixel using a photodetector, which responds only to changes in the scene. AC-coupled readout substantially reduced the optical noise by eliminating the large DC beam. This method can be scaled to achieve smart pixel cameras for read sensor arrays with low-noise and high dynamic range.
|Title of host publication||OMN 2015 - 2015 International Conference on Optical MEMS and Nanophotonics|
|Publication status||Published - 5 Oct 2015|
|Event||International Conference on Optical MEMS and Nanophotonics, OMN 2015 - Jerusalem, Israel|
Duration: 2 Aug 2015 → 5 Aug 2015
|Conference||International Conference on Optical MEMS and Nanophotonics, OMN 2015|
|Period||2/08/15 → 5/08/15|