MEMS bimaterial IR sensor array with AC-coupled optical readout

Ulas Adiyan; Fehmi Civitci; Onur Ferhanoglu; Hamdi Torun; Hakan Urey

doi:10.1109/OMN.2015.7288834

MEMS bimaterial IR sensor array with AC-coupled optical readout

Ulas Adiyan, Fehmi Civitci, Onur Ferhanoglu, Hamdi Torun, Hakan Urey

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

2 Citations (Scopus)

Abstract

This paper demonstrates a 35-μm pixel pitch MEMS thermal sensor array with optical-readout. We implemented an AC-coupled readout method for a single MEMS pixel using a photodetector, which responds only to changes in the scene. AC-coupled readout substantially reduced the optical noise by eliminating the large DC beam. This method can be scaled to achieve smart pixel cameras for read sensor arrays with low-noise and high dynamic range.

Original language	English
Title of host publication	OMN 2015 - 2015 International Conference on Optical MEMS and Nanophotonics
Publisher	IEEE
ISBN (Electronic)	9781467368353
ISBN (Print)	9781467368346
DOIs	https://doi.org/10.1109/OMN.2015.7288834
Publication status	Published - 5 Oct 2015
Externally published	Yes
Event	International Conference on Optical MEMS and Nanophotonics, OMN 2015 - Jerusalem, Israel Duration: 2 Aug 2015 → 5 Aug 2015

Conference

Conference	International Conference on Optical MEMS and Nanophotonics, OMN 2015
Country/Territory	Israel
City	Jerusalem
Period	2/08/15 → 5/08/15

Keywords

AC coupling
IR Detection
Optical Readout
Thermo-Mechanical MEMS

Access to Document

10.1109/OMN.2015.7288834

Cite this

@inproceedings{095a56dfbca14021b5850d1cac917302,

title = "MEMS bimaterial IR sensor array with AC-coupled optical readout",

abstract = "This paper demonstrates a 35-μm pixel pitch MEMS thermal sensor array with optical-readout. We implemented an AC-coupled readout method for a single MEMS pixel using a photodetector, which responds only to changes in the scene. AC-coupled readout substantially reduced the optical noise by eliminating the large DC beam. This method can be scaled to achieve smart pixel cameras for read sensor arrays with low-noise and high dynamic range.",

keywords = "AC coupling, IR Detection, Optical Readout, Thermo-Mechanical MEMS",

author = "Ulas Adiyan and Fehmi Civitci and Onur Ferhanoglu and Hamdi Torun and Hakan Urey",

year = "2015",

month = oct,

day = "5",

doi = "10.1109/OMN.2015.7288834",

language = "English",

isbn = "9781467368346",

booktitle = "OMN 2015 - 2015 International Conference on Optical MEMS and Nanophotonics",

publisher = "IEEE",

address = "United States",

note = "International Conference on Optical MEMS and Nanophotonics, OMN 2015 ; Conference date: 02-08-2015 Through 05-08-2015",

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TY - GEN

T1 - MEMS bimaterial IR sensor array with AC-coupled optical readout

AU - Adiyan, Ulas

AU - Civitci, Fehmi

AU - Ferhanoglu, Onur

AU - Torun, Hamdi

AU - Urey, Hakan

PY - 2015/10/5

Y1 - 2015/10/5

N2 - This paper demonstrates a 35-μm pixel pitch MEMS thermal sensor array with optical-readout. We implemented an AC-coupled readout method for a single MEMS pixel using a photodetector, which responds only to changes in the scene. AC-coupled readout substantially reduced the optical noise by eliminating the large DC beam. This method can be scaled to achieve smart pixel cameras for read sensor arrays with low-noise and high dynamic range.

AB - This paper demonstrates a 35-μm pixel pitch MEMS thermal sensor array with optical-readout. We implemented an AC-coupled readout method for a single MEMS pixel using a photodetector, which responds only to changes in the scene. AC-coupled readout substantially reduced the optical noise by eliminating the large DC beam. This method can be scaled to achieve smart pixel cameras for read sensor arrays with low-noise and high dynamic range.

KW - AC coupling

KW - IR Detection

KW - Optical Readout

KW - Thermo-Mechanical MEMS

UR - https://www.scopus.com/pages/publications/84958568476

U2 - 10.1109/OMN.2015.7288834

DO - 10.1109/OMN.2015.7288834

M3 - Conference contribution

AN - SCOPUS:84958568476

SN - 9781467368346

BT - OMN 2015 - 2015 International Conference on Optical MEMS and Nanophotonics

PB - IEEE

T2 - International Conference on Optical MEMS and Nanophotonics, OMN 2015

Y2 - 2 August 2015 through 5 August 2015

ER -

MEMS bimaterial IR sensor array with AC-coupled optical readout

Abstract

Conference

Keywords

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