MEMS sensor array platform integrated with CMOS based optical readout

Refik Burak Erarslan, Sevil Zeynep Lulec, Ulas Adiyan*, Selim Olcer, Yuksel Temiz, Yusuf Leblebici, Hamdi Torun, Hakan Urey

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Citations (Scopus)

Abstract

This paper reports a micro electro-mechanical system (MEMS) based sensor array integrated with CMOS-based optical readout. The integrated architecture has several unique features and reported here for the first time. MEMS devices are passive and there are no electrical connections to the MEMS sensor array. Thus the architecture is scalable to large array formats for parallel measurement applications and can even be made as a disposable cartridge in the future using self-aligning features. A CMOS-based readout integrated circuit (ROIC) is integrated to the MEMS chip. Via holes are defined on ROIC by customized post-processing to enable integrated optical readout. A diffraction grating interferometer-based optical readout is realized by pixel-level illumination of the MEMS chip through the via holes and by capturing the reflected light using a photodetector array on the CMOS chip.

Original languageEnglish
Title of host publicationIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
PublisherIEEE
Pages181-184
Number of pages4
ISBN (Electronic)9781467356558
ISBN (Print)9781467356541
DOIs
Publication statusPublished - 7 Mar 2013
EventIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 - Taipei, Taiwan, Province of China
Duration: 20 Jan 201324 Jan 2013

Publication series

NameIEEE MEMS
PublisherIEEE
ISSN (Print)1084-6999

Conference

ConferenceIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
CountryTaiwan, Province of China
CityTaipei
Period20/01/1324/01/13

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