Microfabrication and nanotechnology in manufacturing system - An overview

O. M. Ikumapayi; E. T. Akinlabi; A. O.M. Adeoye; S. O. Fatoba

doi:10.1016/j.matpr.2020.11.233

Microfabrication and nanotechnology in manufacturing system - An overview

O. M. Ikumapayi^*, E. T. Akinlabi, A. O.M. Adeoye, S. O. Fatoba

^*Corresponding author for this work

Research output: Contribution to journal › Conference article › peer-review

30 Citations (Scopus)

Abstract

An insight into nanotechnology, microfabrication, and their relevance were explored in this review. A brief history of the emancipation of nanotechnology and their various applications were documented. Microfabrication and its relevance in automobiles and medicine are scripted. A brief overview of photolithography, soft lithography, film deposition, and etching is presented. The evolution of the integrated circuit system and microelectromechanical system (MEMS) are also documented.

Original language	English
Pages (from-to)	1154-1162
Number of pages	9
Journal	Materials Today: Proceedings
Volume	44
Issue number	1
Early online date	24 Dec 2020
DOIs	https://doi.org/10.1016/j.matpr.2020.11.233
Publication status	Published - 2021
Externally published	Yes
Event	11th International Conference on Materials Processing and Characterization - Indore, India Duration: 15 Dec 2020 → 17 Dec 2020

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10.1016/j.matpr.2020.11.233

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abstract = "An insight into nanotechnology, microfabrication, and their relevance were explored in this review. A brief history of the emancipation of nanotechnology and their various applications were documented. Microfabrication and its relevance in automobiles and medicine are scripted. A brief overview of photolithography, soft lithography, film deposition, and etching is presented. The evolution of the integrated circuit system and microelectromechanical system (MEMS) are also documented.",

keywords = "Integrated Circuit system, Microelectromechanical system, Microfabrication, Nanotechnology, Photolithography",

author = "Ikumapayi, {O. M.} and Akinlabi, {E. T.} and Adeoye, {A. O.M.} and Fatoba, {S. O.}",

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AU - Adeoye, A. O.M.

AU - Fatoba, S. O.

PY - 2021

Y1 - 2021

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AB - An insight into nanotechnology, microfabrication, and their relevance were explored in this review. A brief history of the emancipation of nanotechnology and their various applications were documented. Microfabrication and its relevance in automobiles and medicine are scripted. A brief overview of photolithography, soft lithography, film deposition, and etching is presented. The evolution of the integrated circuit system and microelectromechanical system (MEMS) are also documented.

KW - Integrated Circuit system

KW - Microelectromechanical system

KW - Microfabrication

KW - Nanotechnology

KW - Photolithography

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ER -

Microfabrication and nanotechnology in manufacturing system - An overview

Abstract

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