An insight into nanotechnology, microfabrication, and their relevance were explored in this review. A brief history of the emancipation of nanotechnology and their various applications were documented. Microfabrication and its relevance in automobiles and medicine are scripted. A brief overview of photolithography, soft lithography, film deposition, and etching is presented. The evolution of the integrated circuit system and microelectromechanical system (MEMS) are also documented.
|Number of pages||9|
|Journal||Materials Today: Proceedings|
|Early online date||24 Dec 2020|
|Publication status||Published - 2021|
|Event||11th International Conference on Materials Processing and Characterization - Indore, India|
Duration: 15 Dec 2020 → 17 Dec 2020