Abstract
An insight into nanotechnology, microfabrication, and their relevance were explored in this review. A brief history of the emancipation of nanotechnology and their various applications were documented. Microfabrication and its relevance in automobiles and medicine are scripted. A brief overview of photolithography, soft lithography, film deposition, and etching is presented. The evolution of the integrated circuit system and microelectromechanical system (MEMS) are also documented.
| Original language | English |
|---|---|
| Pages (from-to) | 1154-1162 |
| Number of pages | 9 |
| Journal | Materials Today: Proceedings |
| Volume | 44 |
| Issue number | 1 |
| Early online date | 24 Dec 2020 |
| DOIs | |
| Publication status | Published - 2021 |
| Externally published | Yes |
| Event | 11th International Conference on Materials Processing and Characterization - Indore, India Duration: 15 Dec 2020 → 17 Dec 2020 |
Keywords
- Integrated Circuit system
- Microelectromechanical system
- Microfabrication
- Nanotechnology
- Photolithography
