Microfluidics based on ZnO/nanocrystalline diamond surface acoustic wave devices

Yong Qing Fu; Luis Garcia-Gancedo; Hua-Feng Pang; Samuele Porro; Yan-Wei Gu; Jikui Luo; Xiao-Tao Zu; Frank Placido; John I. Wilson; Andrew Flewitt; William Milne

doi:10.1063/1.3699974

Microfluidics based on ZnO/nanocrystalline diamond surface acoustic wave devices

Yong Qing Fu, Luis Garcia-Gancedo, Hua-Feng Pang, Samuele Porro, Yan-Wei Gu, Jikui Luo, Xiao-Tao Zu, Frank Placido, John I. Wilson, Andrew Flewitt, William Milne

Mathematics, Physics and Electrical Engineering

Research output: Contribution to journal › Article › peer-review

66 Citations (Scopus)

Abstract

Surface acoustic wave(SAW)devices with 64 μm wavelength were fabricated on a zinc oxide (ZnO)film deposited on top of an ultra-smooth nanocrystallinediamond(UNCD) layer. The smooth surface of the UNCDfilm allowed the growth of the ZnOfilm with excellent c-axis orientation and low surface roughness, suitable for SAW fabrication, and could restrain the wave from significantly dissipating into the substrate. The frequency response of the fabricated devices was characterized and a Rayleigh mode was observed at ∼65.4 MHz. This mode was utilised to demonstrate that the ZnO/UNCD SAWdevice can be successfully used for microfluidic applications. Streaming, pumping, and jetting using microdroplets of 0.5 and 20 μl were achieved and characterized under different powers applied to the SAWdevice, focusing more on the jetting behaviors induced by the ZnOSAW.

Original language	English
Pages (from-to)	024105
Journal	Biomicrofluidics
Volume	6
Issue number	2
DOIs	https://doi.org/10.1063/1.3699974
Publication status	Published - 2012

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title = "Microfluidics based on ZnO/nanocrystalline diamond surface acoustic wave devices",

abstract = "Surface acoustic wave(SAW)devices with 64 μm wavelength were fabricated on a zinc oxide (ZnO)film deposited on top of an ultra-smooth nanocrystallinediamond(UNCD) layer. The smooth surface of the UNCDfilm allowed the growth of the ZnOfilm with excellent c-axis orientation and low surface roughness, suitable for SAW fabrication, and could restrain the wave from significantly dissipating into the substrate. The frequency response of the fabricated devices was characterized and a Rayleigh mode was observed at ∼65.4 MHz. This mode was utilised to demonstrate that the ZnO/UNCD SAWdevice can be successfully used for microfluidic applications. Streaming, pumping, and jetting using microdroplets of 0.5 and 20 μl were achieved and characterized under different powers applied to the SAWdevice, focusing more on the jetting behaviors induced by the ZnOSAW.",

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T1 - Microfluidics based on ZnO/nanocrystalline diamond surface acoustic wave devices

AU - Fu, Yong Qing

AU - Garcia-Gancedo, Luis

AU - Pang, Hua-Feng

AU - Porro, Samuele

AU - Gu, Yan-Wei

AU - Luo, Jikui

AU - Zu, Xiao-Tao

AU - Placido, Frank

AU - Wilson, John I.

AU - Flewitt, Andrew

AU - Milne, William

PY - 2012

Y1 - 2012

N2 - Surface acoustic wave(SAW)devices with 64 μm wavelength were fabricated on a zinc oxide (ZnO)film deposited on top of an ultra-smooth nanocrystallinediamond(UNCD) layer. The smooth surface of the UNCDfilm allowed the growth of the ZnOfilm with excellent c-axis orientation and low surface roughness, suitable for SAW fabrication, and could restrain the wave from significantly dissipating into the substrate. The frequency response of the fabricated devices was characterized and a Rayleigh mode was observed at ∼65.4 MHz. This mode was utilised to demonstrate that the ZnO/UNCD SAWdevice can be successfully used for microfluidic applications. Streaming, pumping, and jetting using microdroplets of 0.5 and 20 μl were achieved and characterized under different powers applied to the SAWdevice, focusing more on the jetting behaviors induced by the ZnOSAW.

AB - Surface acoustic wave(SAW)devices with 64 μm wavelength were fabricated on a zinc oxide (ZnO)film deposited on top of an ultra-smooth nanocrystallinediamond(UNCD) layer. The smooth surface of the UNCDfilm allowed the growth of the ZnOfilm with excellent c-axis orientation and low surface roughness, suitable for SAW fabrication, and could restrain the wave from significantly dissipating into the substrate. The frequency response of the fabricated devices was characterized and a Rayleigh mode was observed at ∼65.4 MHz. This mode was utilised to demonstrate that the ZnO/UNCD SAWdevice can be successfully used for microfluidic applications. Streaming, pumping, and jetting using microdroplets of 0.5 and 20 μl were achieved and characterized under different powers applied to the SAWdevice, focusing more on the jetting behaviors induced by the ZnOSAW.

U2 - 10.1063/1.3699974

DO - 10.1063/1.3699974

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JO - Biomicrofluidics

JF - Biomicrofluidics

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Microfluidics based on ZnO/nanocrystalline diamond surface acoustic wave devices

Abstract

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