@inproceedings{7742207041b046cba2f3e92d2065ad31,

title = "Microheater isolation characterisation to aid the optimisation of a MEMS Leidenfrost engine",

abstract = "This paper reports on the implementation of test structures to characterize the design of a microheater that facilitates localized heating to power a Leidenfrost micro-engines. The test structures are designed to characterize the effect on heat transfer of trenches etched into the silicon substrate. With no trench, the temperature difference is \triangle \mathrm{T}=11.9 oC. The temperature measured across the 412 μ \mathrm{m} deep 'long' trench was 43.6 °C while it was 40.4 °C for the 'short' trench. The results show that increasing the depth of the trench increases the temperature difference across the trench (19.9{}{\circ}\mathrm{C} increase for going from 73 μ \mathrm{m} to 412 μ \mathrm{m}, for the 'short' channel) while the length of the trench has a much less significant effect (3.2{}{\circ}\mathrm{C} increase from 'short' to 'long' trench, for a depth of 412 μ \mathrm{m}). The test structure measurements agreed well with simulation results confirming the validity of using computer aided design as an integral part in the development of microheater designs.",

keywords = "deep etch, Leidenfrost, MEMS engine, microheater, thermal insulation",

author = "Anthony Buchoux and Prashant Agrawal and Wells, {Gary G.} and Rodrigo Ledesma-Aguilar and Walton, {Anthony J.} and Terry, {Jonathan G.} and Glen Mchale and Khellil Sefiane and Stokes, {Adam A.}",

year = "2020",

month = may,

doi = "10.1109/ICMTS48187.2020.9107902",

language = "English",

series = "IEEE International Conference on Microelectronic Test Structures",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

booktitle = "2020 IEEE 33rd International Conference on Microelectronic Test Structures, ICMTS 2020 - Proceedings",

address = "United States",

note = "33rd IEEE International Conference on Microelectronic Test Structures, ICMTS 2020 ; Conference date: 04-05-2020 Through 18-05-2020",

}