Microheater isolation characterisation to aid the optimisation of a MEMS Leidenfrost engine

Anthony Buchoux; Prashant Agrawal; Gary G. Wells; Rodrigo Ledesma-Aguilar; Anthony J. Walton; Jonathan G. Terry; Glen Mchale; Khellil Sefiane; Adam A. Stokes

doi:10.1109/ICMTS48187.2020.9107902

Microheater isolation characterisation to aid the optimisation of a MEMS Leidenfrost engine

Anthony Buchoux^*, Prashant Agrawal, Gary G. Wells, Rodrigo Ledesma-Aguilar, Anthony J. Walton, Jonathan G. Terry, Glen Mchale, Khellil Sefiane, Adam A. Stokes

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

This paper reports on the implementation of test structures to characterize the design of a microheater that facilitates localized heating to power a Leidenfrost micro-engines. The test structures are designed to characterize the effect on heat transfer of trenches etched into the silicon substrate. With no trench, the temperature difference is \triangle \mathrm{T}=11.9 oC. The temperature measured across the 412 μ \mathrm{m} deep 'long' trench was 43.6 °C while it was 40.4 °C for the 'short' trench. The results show that increasing the depth of the trench increases the temperature difference across the trench (19.9{}{\circ}\mathrm{C} increase for going from 73 μ \mathrm{m} to 412 μ \mathrm{m}, for the 'short' channel) while the length of the trench has a much less significant effect (3.2{}{\circ}\mathrm{C} increase from 'short' to 'long' trench, for a depth of 412 μ \mathrm{m}). The test structure measurements agreed well with simulation results confirming the validity of using computer aided design as an integral part in the development of microheater designs.

Original language	English
Title of host publication	2020 IEEE 33rd International Conference on Microelectronic Test Structures, ICMTS 2020 - Proceedings
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781728140087
DOIs	https://doi.org/10.1109/ICMTS48187.2020.9107902
Publication status	Published - May 2020
Event	33rd IEEE International Conference on Microelectronic Test Structures, ICMTS 2020 - Edinburgh, United Kingdom Duration: 4 May 2020 → 18 May 2020

Publication series

Name	IEEE International Conference on Microelectronic Test Structures
Volume	2020-May

Conference

Conference	33rd IEEE International Conference on Microelectronic Test Structures, ICMTS 2020
Country/Territory	United Kingdom
City	Edinburgh
Period	4/05/20 → 18/05/20

Keywords

deep etch
Leidenfrost
MEMS engine
microheater
thermal insulation

Access to Document

10.1109/ICMTS48187.2020.9107902

Cite this

Buchoux, A., Agrawal, P., Wells, G. G., Ledesma-Aguilar, R., Walton, A. J., Terry, J. G., Mchale, G., Sefiane, K., & Stokes, A. A. (2020). Microheater isolation characterisation to aid the optimisation of a MEMS Leidenfrost engine. In 2020 IEEE 33rd International Conference on Microelectronic Test Structures, ICMTS 2020 - Proceedings Article 9107902 (IEEE International Conference on Microelectronic Test Structures; Vol. 2020-May). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ICMTS48187.2020.9107902

Buchoux, Anthony ; Agrawal, Prashant ; Wells, Gary G. et al. / Microheater isolation characterisation to aid the optimisation of a MEMS Leidenfrost engine. 2020 IEEE 33rd International Conference on Microelectronic Test Structures, ICMTS 2020 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2020. (IEEE International Conference on Microelectronic Test Structures).

@inproceedings{7742207041b046cba2f3e92d2065ad31,

title = "Microheater isolation characterisation to aid the optimisation of a MEMS Leidenfrost engine",

abstract = "This paper reports on the implementation of test structures to characterize the design of a microheater that facilitates localized heating to power a Leidenfrost micro-engines. The test structures are designed to characterize the effect on heat transfer of trenches etched into the silicon substrate. With no trench, the temperature difference is \triangle \mathrm{T}=11.9 oC. The temperature measured across the 412 μ \mathrm{m} deep 'long' trench was 43.6 °C while it was 40.4 °C for the 'short' trench. The results show that increasing the depth of the trench increases the temperature difference across the trench (19.9{}{\circ}\mathrm{C} increase for going from 73 μ \mathrm{m} to 412 μ \mathrm{m}, for the 'short' channel) while the length of the trench has a much less significant effect (3.2{}{\circ}\mathrm{C} increase from 'short' to 'long' trench, for a depth of 412 μ \mathrm{m}). The test structure measurements agreed well with simulation results confirming the validity of using computer aided design as an integral part in the development of microheater designs.",

keywords = "deep etch, Leidenfrost, MEMS engine, microheater, thermal insulation",

author = "Anthony Buchoux and Prashant Agrawal and Wells, {Gary G.} and Rodrigo Ledesma-Aguilar and Walton, {Anthony J.} and Terry, {Jonathan G.} and Glen Mchale and Khellil Sefiane and Stokes, {Adam A.}",

year = "2020",

month = may,

doi = "10.1109/ICMTS48187.2020.9107902",

language = "English",

series = "IEEE International Conference on Microelectronic Test Structures",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

booktitle = "2020 IEEE 33rd International Conference on Microelectronic Test Structures, ICMTS 2020 - Proceedings",

address = "United States",

note = "33rd IEEE International Conference on Microelectronic Test Structures, ICMTS 2020 ; Conference date: 04-05-2020 Through 18-05-2020",

}

Buchoux, A, Agrawal, P, Wells, GG, Ledesma-Aguilar, R, Walton, AJ, Terry, JG, Mchale, G, Sefiane, K & Stokes, AA 2020, Microheater isolation characterisation to aid the optimisation of a MEMS Leidenfrost engine. in 2020 IEEE 33rd International Conference on Microelectronic Test Structures, ICMTS 2020 - Proceedings., 9107902, IEEE International Conference on Microelectronic Test Structures, vol. 2020-May, Institute of Electrical and Electronics Engineers Inc., 33rd IEEE International Conference on Microelectronic Test Structures, ICMTS 2020, Edinburgh, United Kingdom, 4/05/20. https://doi.org/10.1109/ICMTS48187.2020.9107902

Microheater isolation characterisation to aid the optimisation of a MEMS Leidenfrost engine. / Buchoux, Anthony; Agrawal, Prashant; Wells, Gary G. et al.
2020 IEEE 33rd International Conference on Microelectronic Test Structures, ICMTS 2020 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2020. 9107902 (IEEE International Conference on Microelectronic Test Structures; Vol. 2020-May).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Microheater isolation characterisation to aid the optimisation of a MEMS Leidenfrost engine

AU - Buchoux, Anthony

AU - Agrawal, Prashant

AU - Wells, Gary G.

AU - Ledesma-Aguilar, Rodrigo

AU - Walton, Anthony J.

AU - Terry, Jonathan G.

AU - Mchale, Glen

AU - Sefiane, Khellil

AU - Stokes, Adam A.

PY - 2020/5

Y1 - 2020/5

N2 - This paper reports on the implementation of test structures to characterize the design of a microheater that facilitates localized heating to power a Leidenfrost micro-engines. The test structures are designed to characterize the effect on heat transfer of trenches etched into the silicon substrate. With no trench, the temperature difference is \triangle \mathrm{T}=11.9 oC. The temperature measured across the 412 μ \mathrm{m} deep 'long' trench was 43.6 °C while it was 40.4 °C for the 'short' trench. The results show that increasing the depth of the trench increases the temperature difference across the trench (19.9{}{\circ}\mathrm{C} increase for going from 73 μ \mathrm{m} to 412 μ \mathrm{m}, for the 'short' channel) while the length of the trench has a much less significant effect (3.2{}{\circ}\mathrm{C} increase from 'short' to 'long' trench, for a depth of 412 μ \mathrm{m}). The test structure measurements agreed well with simulation results confirming the validity of using computer aided design as an integral part in the development of microheater designs.

AB - This paper reports on the implementation of test structures to characterize the design of a microheater that facilitates localized heating to power a Leidenfrost micro-engines. The test structures are designed to characterize the effect on heat transfer of trenches etched into the silicon substrate. With no trench, the temperature difference is \triangle \mathrm{T}=11.9 oC. The temperature measured across the 412 μ \mathrm{m} deep 'long' trench was 43.6 °C while it was 40.4 °C for the 'short' trench. The results show that increasing the depth of the trench increases the temperature difference across the trench (19.9{}{\circ}\mathrm{C} increase for going from 73 μ \mathrm{m} to 412 μ \mathrm{m}, for the 'short' channel) while the length of the trench has a much less significant effect (3.2{}{\circ}\mathrm{C} increase from 'short' to 'long' trench, for a depth of 412 μ \mathrm{m}). The test structure measurements agreed well with simulation results confirming the validity of using computer aided design as an integral part in the development of microheater designs.

KW - deep etch

KW - Leidenfrost

KW - MEMS engine

KW - microheater

KW - thermal insulation

UR - http://www.scopus.com/inward/record.url?scp=85086474821&partnerID=8YFLogxK

U2 - 10.1109/ICMTS48187.2020.9107902

DO - 10.1109/ICMTS48187.2020.9107902

M3 - Conference contribution

AN - SCOPUS:85086474821

T3 - IEEE International Conference on Microelectronic Test Structures

BT - 2020 IEEE 33rd International Conference on Microelectronic Test Structures, ICMTS 2020 - Proceedings

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 33rd IEEE International Conference on Microelectronic Test Structures, ICMTS 2020

Y2 - 4 May 2020 through 18 May 2020

ER -

Buchoux A, Agrawal P, Wells GG, Ledesma-Aguilar R, Walton AJ, Terry JG et al. Microheater isolation characterisation to aid the optimisation of a MEMS Leidenfrost engine. In 2020 IEEE 33rd International Conference on Microelectronic Test Structures, ICMTS 2020 - Proceedings. Institute of Electrical and Electronics Engineers Inc. 2020. 9107902. (IEEE International Conference on Microelectronic Test Structures). doi: 10.1109/ICMTS48187.2020.9107902

Microheater isolation characterisation to aid the optimisation of a MEMS Leidenfrost engine

Abstract

Publication series

Conference

Keywords

Access to Document

Other files and links

Fingerprint

Cite this