Microheater isolation characterisation to aid the optimisation of a MEMS Leidenfrost engine

Anthony Buchoux*, Prashant Agrawal, Gary G. Wells, Rodrigo Ledesma-Aguilar, Anthony J. Walton, Jonathan G. Terry, Glen Mchale, Khellil Sefiane, Adam A. Stokes

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

This paper reports on the implementation of test structures to characterize the design of a microheater that facilitates localized heating to power a Leidenfrost micro-engines. The test structures are designed to characterize the effect on heat transfer of trenches etched into the silicon substrate. With no trench, the temperature difference is \triangle \mathrm{T}=11.9 oC. The temperature measured across the 412 μ \mathrm{m} deep 'long' trench was 43.6 °C while it was 40.4 °C for the 'short' trench. The results show that increasing the depth of the trench increases the temperature difference across the trench (19.9{}{\circ}\mathrm{C} increase for going from 73 μ \mathrm{m} to 412 μ \mathrm{m}, for the 'short' channel) while the length of the trench has a much less significant effect (3.2{}{\circ}\mathrm{C} increase from 'short' to 'long' trench, for a depth of 412 μ \mathrm{m}). The test structure measurements agreed well with simulation results confirming the validity of using computer aided design as an integral part in the development of microheater designs.

Original languageEnglish
Title of host publication2020 IEEE 33rd International Conference on Microelectronic Test Structures, ICMTS 2020 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781728140087
DOIs
Publication statusPublished - May 2020
Event33rd IEEE International Conference on Microelectronic Test Structures, ICMTS 2020 - Edinburgh, United Kingdom
Duration: 4 May 202018 May 2020

Publication series

NameIEEE International Conference on Microelectronic Test Structures
Volume2020-May

Conference

Conference33rd IEEE International Conference on Microelectronic Test Structures, ICMTS 2020
CountryUnited Kingdom
CityEdinburgh
Period4/05/2018/05/20

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