Micromachining for terahertz artifical materials

Andrew Gallant; G. Peter Swift; De Chang Dai; Mikhail Kaliteevski; Dagou Zeze; David Wood; Michael Petty; Stuart Brand; Richard Abram; J. Martyn Chamberlain

doi:10.1557/PROC-1016-CC05-07

Micromachining for terahertz artifical materials

Andrew Gallant, G. Peter Swift, De Chang Dai, Mikhail Kaliteevski, Dagou Zeze, David Wood, Michael Petty, Stuart Brand, Richard Abram, J. Martyn Chamberlain

Mathematics, Physics and Electrical Engineering

Research output: Contribution to journal › Conference article › peer-review

1 Citation (Scopus)

Abstract

In this paper we report on the development of micromachined filters for operation at terahertz frequencies. SU8, a negative photodefinable epoxy, is used to define arrays of high aspect ratio rods which are subsequently sputter coated in gold to form the filter. We fabricate and test a filter with a fixed period but variable diameter along the length of the array. By moving the array in the terahertz beam we demonstrate the ability to mechanically tune specific filter characteristics from a single device.

Original language	English
Article number	1016-CC05-07
Journal	MRS Proceedings
Volume	1016
DOIs	https://doi.org/10.1557/PROC-1016-CC05-07
Publication status	Published - 2007

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title = "Micromachining for terahertz artifical materials",

abstract = "In this paper we report on the development of micromachined filters for operation at terahertz frequencies. SU8, a negative photodefinable epoxy, is used to define arrays of high aspect ratio rods which are subsequently sputter coated in gold to form the filter. We fabricate and test a filter with a fixed period but variable diameter along the length of the array. By moving the array in the terahertz beam we demonstrate the ability to mechanically tune specific filter characteristics from a single device.",

author = "Andrew Gallant and Swift, {G. Peter} and Dai, {De Chang} and Mikhail Kaliteevski and Dagou Zeze and David Wood and Michael Petty and Stuart Brand and Richard Abram and Chamberlain, {J. Martyn}",

year = "2007",

doi = "10.1557/PROC-1016-CC05-07",

language = "English",

volume = "1016",

journal = "MRS Proceedings",

issn = "2059-8521",

publisher = "Cambridge University Press",

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TY - JOUR

T1 - Micromachining for terahertz artifical materials

AU - Gallant, Andrew

AU - Swift, G. Peter

AU - Dai, De Chang

AU - Kaliteevski, Mikhail

AU - Zeze, Dagou

AU - Wood, David

AU - Petty, Michael

AU - Brand, Stuart

AU - Abram, Richard

AU - Chamberlain, J. Martyn

PY - 2007

Y1 - 2007

N2 - In this paper we report on the development of micromachined filters for operation at terahertz frequencies. SU8, a negative photodefinable epoxy, is used to define arrays of high aspect ratio rods which are subsequently sputter coated in gold to form the filter. We fabricate and test a filter with a fixed period but variable diameter along the length of the array. By moving the array in the terahertz beam we demonstrate the ability to mechanically tune specific filter characteristics from a single device.

AB - In this paper we report on the development of micromachined filters for operation at terahertz frequencies. SU8, a negative photodefinable epoxy, is used to define arrays of high aspect ratio rods which are subsequently sputter coated in gold to form the filter. We fabricate and test a filter with a fixed period but variable diameter along the length of the array. By moving the array in the terahertz beam we demonstrate the ability to mechanically tune specific filter characteristics from a single device.

U2 - 10.1557/PROC-1016-CC05-07

DO - 10.1557/PROC-1016-CC05-07

M3 - Conference article

SN - 2059-8521

VL - 1016

JO - MRS Proceedings

JF - MRS Proceedings

M1 - 1016-CC05-07

ER -

Micromachining for terahertz artifical materials

Abstract

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