Micromachining for terahertz artifical materials

Andrew Gallant, G. Peter Swift, De Chang Dai, Mikhail Kaliteevski, Dagou Zeze, David Wood, Michael Petty, Stuart Brand, Richard Abram, J. Martyn Chamberlain

Research output: Contribution to journalConference articlepeer-review

1 Citation (Scopus)


In this paper we report on the development of micromachined filters for operation at terahertz frequencies. SU8, a negative photodefinable epoxy, is used to define arrays of high aspect ratio rods which are subsequently sputter coated in gold to form the filter. We fabricate and test a filter with a fixed period but variable diameter along the length of the array. By moving the array in the terahertz beam we demonstrate the ability to mechanically tune specific filter characteristics from a single device.
Original languageEnglish
Article number1016-CC05-07
JournalMRS Proceedings
Publication statusPublished - 2007


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