Micromachining for terahertz artifical materials

Andrew Gallant; G. Peter Swift; De Chang Dai; Mikhail Kaliteevski; Dagou Zeze; David Wood; Michael Petty; Stuart Brand; Richard Abram; J. Martyn Chamberlain

doi:10.1557/PROC-1016-CC05-07

Micromachining for terahertz artifical materials

Andrew Gallant, G. Peter Swift, De Chang Dai, Mikhail Kaliteevski, Dagou Zeze, David Wood, Michael Petty, Stuart Brand, Richard Abram, J. Martyn Chamberlain

Research output: Contribution to journal › Conference article › peer-review

1 Citation (Scopus)

Abstract

In this paper we report on the development of micromachined filters for operation at terahertz frequencies. SU8, a negative photodefinable epoxy, is used to define arrays of high aspect ratio rods which are subsequently sputter coated in gold to form the filter. We fabricate and test a filter with a fixed period but variable diameter along the length of the array. By moving the array in the terahertz beam we demonstrate the ability to mechanically tune specific filter characteristics from a single device.

Original language	English
Article number	1016-CC05-07
Journal	MRS Proceedings
Volume	1016
DOIs	https://doi.org/10.1557/PROC-1016-CC05-07
Publication status	Published - 2007

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

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10.1557/PROC-1016-CC05-07

Cite this

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title = "Micromachining for terahertz artifical materials",

abstract = "In this paper we report on the development of micromachined filters for operation at terahertz frequencies. SU8, a negative photodefinable epoxy, is used to define arrays of high aspect ratio rods which are subsequently sputter coated in gold to form the filter. We fabricate and test a filter with a fixed period but variable diameter along the length of the array. By moving the array in the terahertz beam we demonstrate the ability to mechanically tune specific filter characteristics from a single device.",

author = "Andrew Gallant and Swift, \{G. Peter\} and Dai, \{De Chang\} and Mikhail Kaliteevski and Dagou Zeze and David Wood and Michael Petty and Stuart Brand and Richard Abram and Chamberlain, \{J. Martyn\}",

year = "2007",

doi = "10.1557/PROC-1016-CC05-07",

language = "English",

volume = "1016",

journal = "MRS Proceedings",

issn = "2059-8521",

publisher = "Springer",

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TY - JOUR

T1 - Micromachining for terahertz artifical materials

AU - Gallant, Andrew

AU - Swift, G. Peter

AU - Dai, De Chang

AU - Kaliteevski, Mikhail

AU - Zeze, Dagou

AU - Wood, David

AU - Petty, Michael

AU - Brand, Stuart

AU - Abram, Richard

AU - Chamberlain, J. Martyn

PY - 2007

Y1 - 2007

N2 - In this paper we report on the development of micromachined filters for operation at terahertz frequencies. SU8, a negative photodefinable epoxy, is used to define arrays of high aspect ratio rods which are subsequently sputter coated in gold to form the filter. We fabricate and test a filter with a fixed period but variable diameter along the length of the array. By moving the array in the terahertz beam we demonstrate the ability to mechanically tune specific filter characteristics from a single device.

AB - In this paper we report on the development of micromachined filters for operation at terahertz frequencies. SU8, a negative photodefinable epoxy, is used to define arrays of high aspect ratio rods which are subsequently sputter coated in gold to form the filter. We fabricate and test a filter with a fixed period but variable diameter along the length of the array. By moving the array in the terahertz beam we demonstrate the ability to mechanically tune specific filter characteristics from a single device.

UR - https://www.scopus.com/pages/publications/70349901071

U2 - 10.1557/PROC-1016-CC05-07

DO - 10.1557/PROC-1016-CC05-07

M3 - Conference article

SN - 2059-8521

VL - 1016

JO - MRS Proceedings

JF - MRS Proceedings

M1 - 1016-CC05-07

ER -

Micromachining for terahertz artifical materials

Abstract

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