Modelling and experimental verification of heat dissipation mechanisms in an SU-8 electrothermal microgripper

Belen Solano, James Merrell, Andrew Gallant, David Wood

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)

Abstract

Within this work, a microgripper based on a hot?cold arm principle was tested to give a greater understanding of the associated heat dissipation methods. Experiments were conducted in air at atmospheric and sub-atmospheric pressure, and in helium, argon and helium at sub-atmospheric pressure. The change in deflection, when using gases with different thermal conductivities and at varying pressures showed the significance of conduction through the atmosphere. The experimental results were found to verify a theoretical model created previously by this group, and a further model developed independently; both predicted the deflection that a given current would cause.
Original languageEnglish
Pages (from-to)90-93
Number of pages4
JournalMicroelectronic engineering.
Volume124
Early online date16 Jun 2014
DOIs
Publication statusPublished - 25 Jul 2014

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