MOEMS thermal imaging camera

M. Fatih Toy*, Onur Ferhanoglu, Hamdi Torun, F. Levent Degertekin, Hakan Urey

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review


A novel thermo-mechanical Infrared (IR) imaging array with integrated diffraction gratings for optical readout was fabricated and tested. Parylene was used as a structural material for its low thermal conductivity and high thermal expansion properties. Tests were performed using an IR blackbody target and first order diffracted light was imaged on a CCD camera to monitor the entire array. Results show that it is possible to achieve <100mK NETD using a 12 bit CCD camera.

Original languageEnglish
Title of host publicationPRIME - 2008 PhD Research in Microelectronics and Electronics, Proceedings
Number of pages4
ISBN (Print)9781424419838
Publication statusPublished - 12 Aug 2008
EventPRIME - 4th Ph.D. Research in Microelectronics and Electronics Conference 2008 - Istanbul, Turkey
Duration: 22 Jun 200825 Jun 2008


ConferencePRIME - 4th Ph.D. Research in Microelectronics and Electronics Conference 2008

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