MOEMS thermal imaging camera

M. Fatih Toy; Onur Ferhanoglu; Hamdi Torun; F. Levent Degertekin; Hakan Urey

doi:10.1109/RME.2008.4595735

MOEMS thermal imaging camera

M. Fatih Toy^*, Onur Ferhanoglu, Hamdi Torun, F. Levent Degertekin, Hakan Urey

^*Corresponding author for this work

Mathematics, Physics and Electrical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

A novel thermo-mechanical Infrared (IR) imaging array with integrated diffraction gratings for optical readout was fabricated and tested. Parylene was used as a structural material for its low thermal conductivity and high thermal expansion properties. Tests were performed using an IR blackbody target and first order diffracted light was imaged on a CCD camera to monitor the entire array. Results show that it is possible to achieve <100mK NETD using a 12 bit CCD camera.

Original language	English
Title of host publication	PRIME - 2008 PhD Research in Microelectronics and Electronics, Proceedings
Publisher	IEEE
Pages	101-104
Number of pages	4
ISBN (Print)	9781424419838
DOIs	https://doi.org/10.1109/RME.2008.4595735
Publication status	Published - 12 Aug 2008
Event	PRIME - 4th Ph.D. Research in Microelectronics and Electronics Conference 2008 - Istanbul, Turkey Duration: 22 Jun 2008 → 25 Jun 2008

Conference

Conference	PRIME - 4th Ph.D. Research in Microelectronics and Electronics Conference 2008
Country/Territory	Turkey
City	Istanbul
Period	22/06/08 → 25/06/08

Keywords

Detectors
Charge coupled devices
Temperature measurement
Cameras
Noise
Arrays
Optical device fabrication

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10.1109/RME.2008.4595735

Cite this

@inproceedings{1126e348190f482682789865efaf73da,

title = "MOEMS thermal imaging camera",

abstract = "A novel thermo-mechanical Infrared (IR) imaging array with integrated diffraction gratings for optical readout was fabricated and tested. Parylene was used as a structural material for its low thermal conductivity and high thermal expansion properties. Tests were performed using an IR blackbody target and first order diffracted light was imaged on a CCD camera to monitor the entire array. Results show that it is possible to achieve <100mK NETD using a 12 bit CCD camera.",

keywords = "Detectors, Charge coupled devices, Temperature measurement, Cameras, Noise, Arrays, Optical device fabrication",

author = "{Fatih Toy}, M. and Onur Ferhanoglu and Hamdi Torun and {Levent Degertekin}, F. and Hakan Urey",

year = "2008",

month = aug,

day = "12",

doi = "10.1109/RME.2008.4595735",

language = "English",

isbn = "9781424419838",

pages = "101--104",

booktitle = "PRIME - 2008 PhD Research in Microelectronics and Electronics, Proceedings",

publisher = "IEEE",

address = "United States",

note = "PRIME - 4th Ph.D. Research in Microelectronics and Electronics Conference 2008 ; Conference date: 22-06-2008 Through 25-06-2008",

}

TY - GEN

T1 - MOEMS thermal imaging camera

AU - Fatih Toy, M.

AU - Ferhanoglu, Onur

AU - Torun, Hamdi

AU - Levent Degertekin, F.

AU - Urey, Hakan

PY - 2008/8/12

Y1 - 2008/8/12

N2 - A novel thermo-mechanical Infrared (IR) imaging array with integrated diffraction gratings for optical readout was fabricated and tested. Parylene was used as a structural material for its low thermal conductivity and high thermal expansion properties. Tests were performed using an IR blackbody target and first order diffracted light was imaged on a CCD camera to monitor the entire array. Results show that it is possible to achieve <100mK NETD using a 12 bit CCD camera.

AB - A novel thermo-mechanical Infrared (IR) imaging array with integrated diffraction gratings for optical readout was fabricated and tested. Parylene was used as a structural material for its low thermal conductivity and high thermal expansion properties. Tests were performed using an IR blackbody target and first order diffracted light was imaged on a CCD camera to monitor the entire array. Results show that it is possible to achieve <100mK NETD using a 12 bit CCD camera.

KW - Detectors

KW - Charge coupled devices

KW - Temperature measurement

KW - Cameras

KW - Noise

KW - Arrays

KW - Optical device fabrication

U2 - 10.1109/RME.2008.4595735

DO - 10.1109/RME.2008.4595735

M3 - Conference contribution

AN - SCOPUS:51849121067

SN - 9781424419838

SP - 101

EP - 104

BT - PRIME - 2008 PhD Research in Microelectronics and Electronics, Proceedings

PB - IEEE

T2 - PRIME - 4th Ph.D. Research in Microelectronics and Electronics Conference 2008

Y2 - 22 June 2008 through 25 June 2008

ER -

MOEMS thermal imaging camera

Abstract

Conference

Keywords

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