A novel thermo-mechanical Infrared (IR) imaging array with integrated diffraction gratings for optical readout was fabricated and tested. Parylene was used as a structural material for its low thermal conductivity and high thermal expansion properties. Tests were performed using an IR blackbody target and first order diffracted light was imaged on a CCD camera to monitor the entire array. Results show that it is possible to achieve <100mK NETD using a 12 bit CCD camera.
|Title of host publication||PRIME - 2008 PhD Research in Microelectronics and Electronics, Proceedings|
|Number of pages||4|
|Publication status||Published - 12 Aug 2008|
|Event||PRIME - 4th Ph.D. Research in Microelectronics and Electronics Conference 2008 - Istanbul, Turkey|
Duration: 22 Jun 2008 → 25 Jun 2008
|Conference||PRIME - 4th Ph.D. Research in Microelectronics and Electronics Conference 2008|
|Period||22/06/08 → 25/06/08|