Nanofabricated solid immersion lenses registered to single emitters in diamond

L.  Marseglia; J. P.  Hadden; A. C.  Stanley-Clarke; J. P.  Harrison; B.  Patton; Y.-L. D Ho; B.  Naydenov; F.  Jelezko; J.  Meijer; P. R.  Dolan; J. M.  Smith; J. G.  Rarity; J. L.  O’Brien

doi:10.1063/1.3573870

Nanofabricated solid immersion lenses registered to single emitters in diamond

L. Marseglia, J. P. Hadden, A. C. Stanley-Clarke, J. P. Harrison, B. Patton, Y.-L. D Ho, B. Naydenov, F. Jelezko, J. Meijer, P. R. Dolan, J. M. Smith, J. G. Rarity, J. L. O’Brien

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Abstract

We describe a technique for fabricating micro- and nanostructures incorporating fluorescent defects in diamond with a positional accuracy better than hundreds of nanometers. Using confocal fluorescence microscopy and focused ion beam etching, we initially locate a suitable defect with respect to registration marks on the diamond surface then etch a structure using these coordinates. We demonstrate the technique by etching an 8 μm diameter hemisphere positioned with single negatively charged nitrogen-vacancy defect lies at its origin. Direct comparison of the fluorescence photon count rate before and after fabrication shows an eightfold increase due to the presence of the hemisphere.

Original language	English
Article number	133107
Number of pages	3
Journal	Applied Physics Letters
Volume	98
Issue number	13
DOIs	https://doi.org/10.1063/1.3573870
Publication status	Published - 30 Mar 2011
Externally published	Yes

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title = "Nanofabricated solid immersion lenses registered to single emitters in diamond",

abstract = "We describe a technique for fabricating micro- and nanostructures incorporating fluorescent defects in diamond with a positional accuracy better than hundreds of nanometers. Using confocal fluorescence microscopy and focused ion beam etching, we initially locate a suitable defect with respect to registration marks on the diamond surface then etch a structure using these coordinates. We demonstrate the technique by etching an 8 μm diameter hemisphere positioned with single negatively charged nitrogen-vacancy defect lies at its origin. Direct comparison of the fluorescence photon count rate before and after fabrication shows an eightfold increase due to the presence of the hemisphere.",

author = "L. Marseglia and Hadden, \{J. P.\} and Stanley-Clarke, \{A. C.\} and Harrison, \{J. P.\} and B. Patton and Ho, \{Y.-L. D\} and B. Naydenov and F. Jelezko and J. Meijer and Dolan, \{P. R.\} and Smith, \{J. M.\} and Rarity, \{J. G.\} and O{\textquoteright}Brien, \{J. L.\}",

year = "2011",

month = mar,

day = "30",

doi = "10.1063/1.3573870",

language = "English",

volume = "98",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

number = "13",

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TY - JOUR

T1 - Nanofabricated solid immersion lenses registered to single emitters in diamond

AU - Marseglia, L.

AU - Hadden, J. P.

AU - Stanley-Clarke, A. C.

AU - Harrison, J. P.

AU - Patton, B.

AU - Ho, Y.-L. D

AU - Naydenov, B.

AU - Jelezko, F.

AU - Meijer, J.

AU - Dolan, P. R.

AU - Smith, J. M.

AU - Rarity, J. G.

AU - O’Brien, J. L.

PY - 2011/3/30

Y1 - 2011/3/30

N2 - We describe a technique for fabricating micro- and nanostructures incorporating fluorescent defects in diamond with a positional accuracy better than hundreds of nanometers. Using confocal fluorescence microscopy and focused ion beam etching, we initially locate a suitable defect with respect to registration marks on the diamond surface then etch a structure using these coordinates. We demonstrate the technique by etching an 8 μm diameter hemisphere positioned with single negatively charged nitrogen-vacancy defect lies at its origin. Direct comparison of the fluorescence photon count rate before and after fabrication shows an eightfold increase due to the presence of the hemisphere.

AB - We describe a technique for fabricating micro- and nanostructures incorporating fluorescent defects in diamond with a positional accuracy better than hundreds of nanometers. Using confocal fluorescence microscopy and focused ion beam etching, we initially locate a suitable defect with respect to registration marks on the diamond surface then etch a structure using these coordinates. We demonstrate the technique by etching an 8 μm diameter hemisphere positioned with single negatively charged nitrogen-vacancy defect lies at its origin. Direct comparison of the fluorescence photon count rate before and after fabrication shows an eightfold increase due to the presence of the hemisphere.

UR - http://arxiv.org/abs/1012.1135

UR - https://www.scopus.com/pages/publications/79953748360

U2 - 10.1063/1.3573870

DO - 10.1063/1.3573870

M3 - Article

SN - 0003-6951

VL - 98

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 13

M1 - 133107

ER -

Nanofabricated solid immersion lenses registered to single emitters in diamond

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