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Nonlinear thermo-mechanical behaviour of MEMS resonators
Hamed Farokhi
, Mergen H. Ghayesh
*
*
Corresponding author for this work
Mechanical and Construction Engineering
Research output
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Contribution to journal
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Article
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peer-review
26
Citations (Scopus)
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Physics & Astronomy
microelectromechanical systems
100%
resonators
77%
alternating current
45%
mechanical properties
34%
electrodes
32%
temperature
30%
Galerkin method
30%
electric potential
27%
dynamic response
27%
temperature effects
23%
deflection
23%
equations of motion
22%
direct current
20%
harmonics
17%
configurations
13%
Engineering & Materials Science
Resonators
97%
MEMS
95%
Temperature
41%
Electrodes
39%
Mechanical properties
33%
Galerkin methods
29%
Electric potential
26%
Thermal effects
26%
Equations of motion
24%
Dynamic response
22%
Chemical Compounds
Voltage
74%
Behavior as Electrode
51%
Resonance
41%