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Optimisation of the performance characteristics of Cu-Al-Mo thin film resistors
Martin Birkett
Mechanical and Construction Engineering
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Doctoral Thesis
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Physics & Astronomy
adjusting
13%
aluminum
22%
chemical composition
14%
chromium
30%
coefficients
26%
copper
23%
electrical properties
11%
electrical resistivity
30%
heat treatment
13%
lasers
7%
manufacturing
27%
molybdenum
32%
nickel
13%
optimization
64%
performance
43%
resistors
100%
silicon
8%
tantalum nitrides
24%
temperature
14%
theses
20%
thin films
50%