Piezoelectric ZnO Thin Films for 2DOF MEMS Vibrational Energy Harvesting

Kai Tao, Haiping Yi, Lihua Tang, Jin Wu, Peihong Wang, Nan Wang, Liangxing Hu, Yong Qing Fu, Jianmin Miao, Honglong Chang

Research output: Contribution to journal › Article › peer-review

111 Citations (Scopus)
63 Downloads (Pure)

Fingerprint

Dive into the research topics of 'Piezoelectric ZnO Thin Films for 2DOF MEMS Vibrational Energy Harvesting'. Together they form a unique fingerprint.

Engineering