Piezoelectric ZnO Thin Films for 2DOF MEMS Vibrational Energy Harvesting

Kai Tao, Haiping Yi, Lihua Tang, Jin Wu, Peihong Wang, Nan Wang, Liangxing Hu, Yong Qing Fu, Jianmin Miao, Honglong Chang

Research output: Contribution to journal › Article › peer-review

135 Citations (Scopus)