Raman and finite-element analysis of a mechanically strained silicon microstructure.

Michael Bowden; Derek Gardiner; David Wood; James Burdess; Alun Harris; John Hedley

doi:10.1088/0960-1317/11/1/302

Raman and finite-element analysis of a mechanically strained silicon microstructure.

Michael Bowden, Derek Gardiner, David Wood, James Burdess, Alun Harris, John Hedley

Research output: Contribution to journal › Article › peer-review

17 Citations (Scopus)

Abstract

Raman microspectroscopy has been used to determine the volumetric micro-strain distribution in mechanically stressed silicon microstructures. Data are presented as strain images with a spatial resolution of around 0.8 µm. A useful correlation is demonstrated between finite-element analysis calculations of volumetric strain and Raman shift. The results demonstrate that silicon beam structures incorporating a 90° bend will experience a non-uniform stress distribution along the bend radius for small radii of curvature.

Original language	English
Pages (from-to)	7-12
Number of pages	6
Journal	Journal of micromechanics and microengineering.
Volume	11
Issue number	1
DOIs	https://doi.org/10.1088/0960-1317/11/1/302
Publication status	Published - 1 Jan 2001

Keywords

Crystalline silicon
Cubic-crystals
Stress
Spectroscopy
Frequencies
Phonons

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10.1088/0960-1317/11/1/302

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title = "Raman and finite-element analysis of a mechanically strained silicon microstructure.",

abstract = "Raman microspectroscopy has been used to determine the volumetric micro-strain distribution in mechanically stressed silicon microstructures. Data are presented as strain images with a spatial resolution of around 0.8 µm. A useful correlation is demonstrated between finite-element analysis calculations of volumetric strain and Raman shift. The results demonstrate that silicon beam structures incorporating a 90° bend will experience a non-uniform stress distribution along the bend radius for small radii of curvature.",

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AU - Bowden, Michael

AU - Gardiner, Derek

AU - Wood, David

AU - Burdess, James

AU - Harris, Alun

AU - Hedley, John

PY - 2001/1/1

Y1 - 2001/1/1

N2 - Raman microspectroscopy has been used to determine the volumetric micro-strain distribution in mechanically stressed silicon microstructures. Data are presented as strain images with a spatial resolution of around 0.8 µm. A useful correlation is demonstrated between finite-element analysis calculations of volumetric strain and Raman shift. The results demonstrate that silicon beam structures incorporating a 90° bend will experience a non-uniform stress distribution along the bend radius for small radii of curvature.

AB - Raman microspectroscopy has been used to determine the volumetric micro-strain distribution in mechanically stressed silicon microstructures. Data are presented as strain images with a spatial resolution of around 0.8 µm. A useful correlation is demonstrated between finite-element analysis calculations of volumetric strain and Raman shift. The results demonstrate that silicon beam structures incorporating a 90° bend will experience a non-uniform stress distribution along the bend radius for small radii of curvature.

KW - Crystalline silicon

KW - Cubic-crystals

KW - Stress

KW - Spectroscopy

KW - Frequencies

KW - Phonons

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DO - 10.1088/0960-1317/11/1/302

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JO - Journal of micromechanics and microengineering.

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IS - 1

ER -

Raman and finite-element analysis of a mechanically strained silicon microstructure.

Abstract

Keywords

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