Rapid and Controllable Digital Microfluidic Heating Using AlN/Si Rayleigh Surface Acoustic Waves

Yong Wang; Qian Zhang; Dongyang Chen; Ran Tao; Yangyang Guan; Zhonggui Xu; Richard Fu; Jin Xie; Richard Fu

doi:10.1109/MEMS46641.2020.9056328

Rapid and Controllable Digital Microfluidic Heating Using AlN/Si Rayleigh Surface Acoustic Waves

Yong Wang, Qian Zhang, Dongyang Chen, Ran Tao, Yangyang Guan, Zhonggui Xu, Richard Fu, Jin Xie^*, Richard Fu

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

4 Citations (Scopus)

Abstract

This paper reports a rapid and controllable digital microfluidic heating system, which is based on a PDMS chamber to hold the liquid and a surface acoustic wave (SAW) device to heat the liquid. Effects of substrate heat dissipation on the temperature stability of SAW heating are studied, and the SAW heating for piezoelectric substrate, sessile droplet and the liquid in PDMS chamber is investigated. Results show that for the sessile droplet, it is difficult to gain a stable temperature at a high power due to significant SAW streaming effects. Whereas the liquid temperate in PDMS chamber can be digitally controlled by the input SAW power and the SAW heating shows good temperature stability and repeatability.

Original language	English
Title of host publication	33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	1098-1101
Number of pages	4
ISBN (Electronic)	9781728135809
DOIs	https://doi.org/10.1109/MEMS46641.2020.9056328
Publication status	Published - Jan 2020
Event	33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020 - Vancouver, Canada Duration: 18 Jan 2020 → 22 Jan 2020

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2020-January
ISSN (Print)	1084-6999

Conference

Conference	33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020
Country/Territory	Canada
City	Vancouver
Period	18/01/20 → 22/01/20

Keywords

Acoustic heating
AlN film
PDMS
SAW

Access to Document

10.1109/MEMS46641.2020.9056328

Cite this

Wang, Y., Zhang, Q., Chen, D., Tao, R., Guan, Y., Xu, Z., Fu, R., Xie, J., & Fu, R. (2020). Rapid and Controllable Digital Microfluidic Heating Using AlN/Si Rayleigh Surface Acoustic Waves. In 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020 (pp. 1098-1101). Article 9056328 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2020-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMS46641.2020.9056328

Wang, Yong ; Zhang, Qian ; Chen, Dongyang et al. / Rapid and Controllable Digital Microfluidic Heating Using AlN/Si Rayleigh Surface Acoustic Waves. 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020. Institute of Electrical and Electronics Engineers Inc., 2020. pp. 1098-1101 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

@inproceedings{ed440340fc66458fa7f62a87e93a1f7a,

title = "Rapid and Controllable Digital Microfluidic Heating Using AlN/Si Rayleigh Surface Acoustic Waves",

abstract = "This paper reports a rapid and controllable digital microfluidic heating system, which is based on a PDMS chamber to hold the liquid and a surface acoustic wave (SAW) device to heat the liquid. Effects of substrate heat dissipation on the temperature stability of SAW heating are studied, and the SAW heating for piezoelectric substrate, sessile droplet and the liquid in PDMS chamber is investigated. Results show that for the sessile droplet, it is difficult to gain a stable temperature at a high power due to significant SAW streaming effects. Whereas the liquid temperate in PDMS chamber can be digitally controlled by the input SAW power and the SAW heating shows good temperature stability and repeatability.",

keywords = "Acoustic heating, AlN film, PDMS, SAW",

author = "Yong Wang and Qian Zhang and Dongyang Chen and Ran Tao and Yangyang Guan and Zhonggui Xu and Richard Fu and Jin Xie and Richard Fu",

note = "Funding Information: This work is supported by the “Zhejiang Provincial Natural Science Foundation of China (LZ19E050002)”, the “National Natural Science Foundation of China (51875521)”, the “Science Fund for Creative Research Groups of National Natural Science Foundation of China (51821093)” and “UK Engineering and Engineering and Physical Sciences Research Council Grants (EPSRC EP/P018998/1)”. Publisher Copyright: {\textcopyright} 2020 IEEE.; 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020 ; Conference date: 18-01-2020 Through 22-01-2020",

year = "2020",

month = jan,

doi = "10.1109/MEMS46641.2020.9056328",

language = "English",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "1098--1101",

booktitle = "33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020",

address = "United States",

}

Wang, Y, Zhang, Q, Chen, D, Tao, R, Guan, Y, Xu, Z, Fu, R, Xie, J & Fu, R 2020, Rapid and Controllable Digital Microfluidic Heating Using AlN/Si Rayleigh Surface Acoustic Waves. in 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020., 9056328, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2020-January, Institute of Electrical and Electronics Engineers Inc., pp. 1098-1101, 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020, Vancouver, Canada, 18/01/20. https://doi.org/10.1109/MEMS46641.2020.9056328

Rapid and Controllable Digital Microfluidic Heating Using AlN/Si Rayleigh Surface Acoustic Waves. / Wang, Yong; Zhang, Qian; Chen, Dongyang et al.
33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020. Institute of Electrical and Electronics Engineers Inc., 2020. p. 1098-1101 9056328 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2020-January).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Rapid and Controllable Digital Microfluidic Heating Using AlN/Si Rayleigh Surface Acoustic Waves

AU - Wang, Yong

AU - Zhang, Qian

AU - Chen, Dongyang

AU - Tao, Ran

AU - Guan, Yangyang

AU - Xu, Zhonggui

AU - Fu, Richard

AU - Xie, Jin

AU - Fu, Richard

N1 - Funding Information: This work is supported by the “Zhejiang Provincial Natural Science Foundation of China (LZ19E050002)”, the “National Natural Science Foundation of China (51875521)”, the “Science Fund for Creative Research Groups of National Natural Science Foundation of China (51821093)” and “UK Engineering and Engineering and Physical Sciences Research Council Grants (EPSRC EP/P018998/1)”. Publisher Copyright: © 2020 IEEE.

PY - 2020/1

Y1 - 2020/1

N2 - This paper reports a rapid and controllable digital microfluidic heating system, which is based on a PDMS chamber to hold the liquid and a surface acoustic wave (SAW) device to heat the liquid. Effects of substrate heat dissipation on the temperature stability of SAW heating are studied, and the SAW heating for piezoelectric substrate, sessile droplet and the liquid in PDMS chamber is investigated. Results show that for the sessile droplet, it is difficult to gain a stable temperature at a high power due to significant SAW streaming effects. Whereas the liquid temperate in PDMS chamber can be digitally controlled by the input SAW power and the SAW heating shows good temperature stability and repeatability.

AB - This paper reports a rapid and controllable digital microfluidic heating system, which is based on a PDMS chamber to hold the liquid and a surface acoustic wave (SAW) device to heat the liquid. Effects of substrate heat dissipation on the temperature stability of SAW heating are studied, and the SAW heating for piezoelectric substrate, sessile droplet and the liquid in PDMS chamber is investigated. Results show that for the sessile droplet, it is difficult to gain a stable temperature at a high power due to significant SAW streaming effects. Whereas the liquid temperate in PDMS chamber can be digitally controlled by the input SAW power and the SAW heating shows good temperature stability and repeatability.

KW - Acoustic heating

KW - AlN film

KW - PDMS

KW - SAW

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U2 - 10.1109/MEMS46641.2020.9056328

DO - 10.1109/MEMS46641.2020.9056328

M3 - Conference contribution

AN - SCOPUS:85083157775

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 1098

EP - 1101

BT - 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020

Y2 - 18 January 2020 through 22 January 2020

ER -

Wang Y, Zhang Q, Chen D, Tao R, Guan Y, Xu Z et al. Rapid and Controllable Digital Microfluidic Heating Using AlN/Si Rayleigh Surface Acoustic Waves. In 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020. Institute of Electrical and Electronics Engineers Inc. 2020. p. 1098-1101. 9056328. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMS46641.2020.9056328

Rapid and Controllable Digital Microfluidic Heating Using AlN/Si Rayleigh Surface Acoustic Waves

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Keywords

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