Real-time monitoring of airborne molecular contamination on antireflection silica coatings using surface acoustic wave technology

Hao Zhu; Dongyi Ao; Wenting Zhang; Ruijie Zhang; Xing Shi; Xiaotao Zu; Bangji Wang; Hongyan Wang; Richard Fu; Yongliang Tang

doi:10.1016/j.sna.2021.112796

Real-time monitoring of airborne molecular contamination on antireflection silica coatings using surface acoustic wave technology

Hao Zhu, Dongyi Ao, Wenting Zhang, Ruijie Zhang, Xing Shi, Xiaotao Zu, Bangji Wang, Hongyan Wang, Richard Fu, Yongliang Tang

Mathematics, Physics and Electrical Engineering

Research output: Contribution to journal › Article › peer-review

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Abstract

Real time monitoring of contamination on antireflection (AR) silica coatings in high peak power laser systems (HPLs) is critically needed in order to avoid reductions of transmission and laser damage to optical surfaces. Herein we proposed to apply a surface acoustic wave (SAW) sensor to real-time monitor trace amounts of airborne molecular contaminants (AMCs) adsorbed on the AR silica coatings. The silica coating is found to be susceptible to AMCs because of its mesoporous structure, huge surface area and polar nature. The adsorbed AMCs caused the increased mass on the silica coating of the SAW sensor, which resulted in a significant increase of its frequency shift. The fabricated sensor showed a high sensitivity of ~-490 mm2ng-1Hz and an excellent linearity vs. the areal density of adsorbed AMCs since the frequency shift of the sensor is linearly related to the change of mass of the silica coating.

Original language	English
Article number	112796
Journal	Sensors and Actuators, A: Physical
Volume	329
Early online date	27 Apr 2021
DOIs	https://doi.org/10.1016/j.sna.2021.112796
Publication status	Published - 1 Oct 2021

Keywords

Airborne molecular contaminant
Antireflection silica coatings
Contamination
SAW sensor

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10.1016/j.sna.2021.112796

SNA revised manuscriptAccepted author manuscript, 955 KBLicence: CC BY-NC-ND

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@article{b3316d91fc8a4fbb972590b40548582d,

title = "Real-time monitoring of airborne molecular contamination on antireflection silica coatings using surface acoustic wave technology",

abstract = "Real time monitoring of contamination on antireflection (AR) silica coatings in high peak power laser systems (HPLs) is critically needed in order to avoid reductions of transmission and laser damage to optical surfaces. Herein we proposed to apply a surface acoustic wave (SAW) sensor to real-time monitor trace amounts of airborne molecular contaminants (AMCs) adsorbed on the AR silica coatings. The silica coating is found to be susceptible to AMCs because of its mesoporous structure, huge surface area and polar nature. The adsorbed AMCs caused the increased mass on the silica coating of the SAW sensor, which resulted in a significant increase of its frequency shift. The fabricated sensor showed a high sensitivity of ~-490 mm2ng-1Hz and an excellent linearity vs. the areal density of adsorbed AMCs since the frequency shift of the sensor is linearly related to the change of mass of the silica coating. ",

keywords = "Airborne molecular contaminant, Antireflection silica coatings, Contamination, SAW sensor",

author = "Hao Zhu and Dongyi Ao and Wenting Zhang and Ruijie Zhang and Xing Shi and Xiaotao Zu and Bangji Wang and Hongyan Wang and Richard Fu and Yongliang Tang",

note = "Funding information: This work was supported by the Fundamental Research Funds for the Central Universities (2682019CX68), the Scientific Research Foundation of SWJTU (A1920502051907-2-032), the National Natural Science Foundation of China (51902272) and the NSAF Joint Foundation of China (U1630126 and U1230124).",

year = "2021",

month = oct,

day = "1",

doi = "10.1016/j.sna.2021.112796",

language = "English",

volume = "329",

journal = "Sensors and Actuators, A: Physical",

issn = "0924-4247",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - Real-time monitoring of airborne molecular contamination on antireflection silica coatings using surface acoustic wave technology

AU - Zhu, Hao

AU - Ao, Dongyi

AU - Zhang, Wenting

AU - Zhang, Ruijie

AU - Shi, Xing

AU - Zu, Xiaotao

AU - Wang, Bangji

AU - Wang, Hongyan

AU - Fu, Richard

AU - Tang, Yongliang

N1 - Funding information: This work was supported by the Fundamental Research Funds for the Central Universities (2682019CX68), the Scientific Research Foundation of SWJTU (A1920502051907-2-032), the National Natural Science Foundation of China (51902272) and the NSAF Joint Foundation of China (U1630126 and U1230124).

PY - 2021/10/1

Y1 - 2021/10/1

N2 - Real time monitoring of contamination on antireflection (AR) silica coatings in high peak power laser systems (HPLs) is critically needed in order to avoid reductions of transmission and laser damage to optical surfaces. Herein we proposed to apply a surface acoustic wave (SAW) sensor to real-time monitor trace amounts of airborne molecular contaminants (AMCs) adsorbed on the AR silica coatings. The silica coating is found to be susceptible to AMCs because of its mesoporous structure, huge surface area and polar nature. The adsorbed AMCs caused the increased mass on the silica coating of the SAW sensor, which resulted in a significant increase of its frequency shift. The fabricated sensor showed a high sensitivity of ~-490 mm2ng-1Hz and an excellent linearity vs. the areal density of adsorbed AMCs since the frequency shift of the sensor is linearly related to the change of mass of the silica coating.

AB - Real time monitoring of contamination on antireflection (AR) silica coatings in high peak power laser systems (HPLs) is critically needed in order to avoid reductions of transmission and laser damage to optical surfaces. Herein we proposed to apply a surface acoustic wave (SAW) sensor to real-time monitor trace amounts of airborne molecular contaminants (AMCs) adsorbed on the AR silica coatings. The silica coating is found to be susceptible to AMCs because of its mesoporous structure, huge surface area and polar nature. The adsorbed AMCs caused the increased mass on the silica coating of the SAW sensor, which resulted in a significant increase of its frequency shift. The fabricated sensor showed a high sensitivity of ~-490 mm2ng-1Hz and an excellent linearity vs. the areal density of adsorbed AMCs since the frequency shift of the sensor is linearly related to the change of mass of the silica coating.

KW - Airborne molecular contaminant

KW - Antireflection silica coatings

KW - Contamination

KW - SAW sensor

UR - http://www.scopus.com/inward/record.url?scp=85105517469&partnerID=8YFLogxK

U2 - 10.1016/j.sna.2021.112796

DO - 10.1016/j.sna.2021.112796

M3 - Article

SN - 0924-4247

VL - 329

JO - Sensors and Actuators, A: Physical

JF - Sensors and Actuators, A: Physical

M1 - 112796

ER -

Real-time monitoring of airborne molecular contamination on antireflection silica coatings using surface acoustic wave technology

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