TY - JOUR
T1 - Record-breaking Frequency of 44 GHz Based on Higher Order Mode of Surface Acoustic Waves with LiNbO3/SiO2/SiC Heterostructures
AU - Zhou, Jian
AU - Zhang, Dinghong
AU - Liu, Yanghui
AU - Zhuo, Fengling
AU - Qian, Lirong
AU - Li, Honglang
AU - Fu, Yongqing (Richard)
AU - Duan, Huigao
N1 - Funding information: This study was supported by the National Science Foundation of China (NSFC No.52075162), The Program of New and High-tech Industry of Hunan Province (2020GK2015, 2021GK4014), The Excellent Youth Fund of Hunan Province (2021JJ20018), Joint fund of the Ministry of Education (Young talents), the Key Research Project of Guangdong Province (2020B0101040002), the Natural Science Foundation of Changsha (kq2007026), Tianjin Enterprise Science and Technology Commissioner Project (Grant No. 19JCTPJC56200), and the Engineering Physics and Science Research Council of UK (EPSRC EP/P018998/1) and International Exchange Grant (IEC/NSFC/201078) through Royal Society and the NSFC.
PY - 2023/1/1
Y1 - 2023/1/1
N2 - Surface acoustic wave (SAW) technology has been extensively explored for wireless communication, sensors, microfluidics, photonics, and quantum information processing. However, due to fabrication issues, the frequencies of SAW devices are typically limited to within a few gigahertz, which severely restricts their applications in 5G communication, precision sensing, photonics, and quantum control. To solve this critical problem, we propose a hybrid strategy that integrates a nanomanufacturing process (i.e., nanolithography) with a LiNbO3/SiO2/SiC heterostructure and successfully achieve a record-breaking frequency of about 44 GHz for SAW devices, in addition to large electromechanical coupling coefficients of up to 15.7%. We perform a theoretical analysis and identify the guided higher order wave modes generated on these slow-on-fast SAW platforms. To demonstrate the superior sensing performance of the proposed ultra-high-frequency SAW platforms, we perform micro-mass sensing and obtain an extremely high sensitivity of approximately 33151.9 MHz·mm2·μg−1, which is about 1011 times higher than that of a conventional quartz crystal microbalance (QCM) and about 4000 times higher than that of a conventional SAW device with a frequency of 978 MHz.
AB - Surface acoustic wave (SAW) technology has been extensively explored for wireless communication, sensors, microfluidics, photonics, and quantum information processing. However, due to fabrication issues, the frequencies of SAW devices are typically limited to within a few gigahertz, which severely restricts their applications in 5G communication, precision sensing, photonics, and quantum control. To solve this critical problem, we propose a hybrid strategy that integrates a nanomanufacturing process (i.e., nanolithography) with a LiNbO3/SiO2/SiC heterostructure and successfully achieve a record-breaking frequency of about 44 GHz for SAW devices, in addition to large electromechanical coupling coefficients of up to 15.7%. We perform a theoretical analysis and identify the guided higher order wave modes generated on these slow-on-fast SAW platforms. To demonstrate the superior sensing performance of the proposed ultra-high-frequency SAW platforms, we perform micro-mass sensing and obtain an extremely high sensitivity of approximately 33151.9 MHz·mm2·μg−1, which is about 1011 times higher than that of a conventional quartz crystal microbalance (QCM) and about 4000 times higher than that of a conventional SAW device with a frequency of 978 MHz.
KW - Higher order mode
KW - Hypersensitive detection
KW - SAW
KW - Ultra-high frequency
UR - http://www.scopus.com/inward/record.url?scp=85138604236&partnerID=8YFLogxK
U2 - 10.1016/j.eng.2022.05.003
DO - 10.1016/j.eng.2022.05.003
M3 - Article
SN - 2095-8099
VL - 20
SP - 112
EP - 119
JO - Engineering
JF - Engineering
ER -