Residual stress in amorphous and nanocrystalline Si films prepared by PECVD with hydrogen dilution

Yong Qing Fu, J. K. Luo, S. B. Milne, Andrew Flewitt, William Milne

Research output: Contribution to journal › Article › peer-review

34 Citations (Scopus)

Fingerprint Dive into the research topics of 'Residual stress in amorphous and nanocrystalline Si films prepared by PECVD with hydrogen dilution'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy