Rocking disc electro-deposition of copper films on Mo/MoSe2 substrates

Charles Cummings, Paul Frith, Guillaume Zoppi, Ian Forbes, Keith Rogers, David Lane, Frank Marken

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)
3 Downloads (Pure)

Abstract

A novel electro-deposition method based on a rocking disc system with π/3 amplitude and variable frequency is introduced. Uniform copper films were deposited from a 0.1 M CuSO4/3.0 M NaOH/0.2 M sorbitol bath directly onto 12.1 cm2 Mo/MoSe2 substrates with X-ray diffraction showing a thickness variation of ±5% over this area. Investigation of the mass transport conditions suggests (i) uniform diffusion over the sample, (ii) a rate of mass transport proportional to the square root of the rocking rate, and (iii) turbulent conditions, which are able to dislodge gas bubbles during electro-deposition.
Original languageEnglish
Pages (from-to)7458-7463
JournalThin Solid Films
Volume519
Issue number21
DOIs
Publication statusPublished - 31 Aug 2011

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