TY - JOUR
T1 - Si-Cu nanocomposite as an effective sensing layer for H2S based on quartz surface acoustic wave sensors
AU - Che, Jian
AU - Wang, Junsen
AU - Qiao, Changcang
AU - Xia, Yudong
AU - Ou, Kai
AU - Zhou, Jing
AU - Ni, Yuxiang
AU - Zhang, Wenting
AU - Han, Yuchen
AU - Zu, Xiaotao
AU - Fu, Yongqing
AU - Tang, Yongliang
N1 - Funding information: This work was supported by the Natural Science Foundation of Sichuan province (2022NSFSC1981), National Natural Science Foundation of China (61178018), and the Engineering Physics and Science Research Council of UK (EP/P018998/1) and International Exchange Grant (201078) through Royal Society and NFSC.
PY - 2023/4/16
Y1 - 2023/4/16
N2 - It has been a critical challenge to develop highly sensitive H2S gas sensors, due to its wide-range application in industry and frequent leakage, which endangers people's lives. In this work, a highly sensitive room-temperature SAW H2S gas sensor based on Si-Cu nanocomposite was developed. The Cu content in this composite layer plays a key role for H2S response of the sensor because CuO, an excellent adsorption site for H2S, presents on the surface of Cu. The amorphous Si content results in the highly porous structure enhancing the interaction between CuO and H2S. The interaction leads to the formation of CuS and a negative frequency response of the sensor. H2O molecules effectively participate the reactions between CuO and H2S, and the responses of H2S were significantly enhanced in a moister environment. With the relative humidity of 60%, the sensor can detect 50 ppb H2S with a response of -225 Hz.
AB - It has been a critical challenge to develop highly sensitive H2S gas sensors, due to its wide-range application in industry and frequent leakage, which endangers people's lives. In this work, a highly sensitive room-temperature SAW H2S gas sensor based on Si-Cu nanocomposite was developed. The Cu content in this composite layer plays a key role for H2S response of the sensor because CuO, an excellent adsorption site for H2S, presents on the surface of Cu. The amorphous Si content results in the highly porous structure enhancing the interaction between CuO and H2S. The interaction leads to the formation of CuS and a negative frequency response of the sensor. H2O molecules effectively participate the reactions between CuO and H2S, and the responses of H2S were significantly enhanced in a moister environment. With the relative humidity of 60%, the sensor can detect 50 ppb H2S with a response of -225 Hz.
KW - CuO
KW - Gas sensor
KW - H S
KW - Humidity
KW - Si
KW - Surface acoustic wave
UR - http://www.scopus.com/inward/record.url?scp=85147856094&partnerID=8YFLogxK
U2 - 10.1016/j.sna.2023.114225
DO - 10.1016/j.sna.2023.114225
M3 - Article
SN - 0924-4247
VL - 353
JO - Sensors and Actuators, A: Physical
JF - Sensors and Actuators, A: Physical
M1 - 114225
ER -