Silicon+-post processing CMOS wafers to create integrated sensors, MEMS and electro-optic systems

Anthony Walton, Tom Stevenson, Ian Underwood, Jonathan Terry, S. Smith, William Parkes, Camelia Dunare, H. Lin, Yifan Li, Robert Henderson, David Renshaw, Bruce Rae, K. Muir, Marc Desmulliez, David Flynn, Mike MacIntosh, Wayne Holland, Alan Murray, Tong Boon Tang, Andrew Bunting

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

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Earth & Environmental Sciences