We proposed a novel two-wavelength optical readout for grating based thermo-mechanical MEMS arrays by using two color LEDS butt-coupled to a multi-mode fiber, which provides spatial auto-registration of two different color images on a single camera. The -1st diffraction orders of the different colors are simultaneously monitored with different channels (R and G) of the RGB camera. The sensitivity of the MEMS array is improved by using the channel data with higher sensitivity for each MEMS detector under a thermal load.
|Title of host publication||2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Proceedings|
|Number of pages||2|
|Publication status||Published - 16 Oct 2014|
|Event||2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Glasgow, United Kingdom|
Duration: 17 Aug 2014 → 21 Aug 2014
|Conference||2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014|
|Period||17/08/14 → 21/08/14|