Simultaneous two-wavelength readout for thermo-mechanical MEMS detectors

Ulas Adiyan*, Fehmi Civitci, Refik Burak Erarslan, Onur Ferhanoglu, Hamdi Torun, Hakan Urey

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Citations (Scopus)

Abstract

We proposed a novel two-wavelength optical readout for grating based thermo-mechanical MEMS arrays by using two color LEDS butt-coupled to a multi-mode fiber, which provides spatial auto-registration of two different color images on a single camera. The -1st diffraction orders of the different colors are simultaneously monitored with different channels (R and G) of the RGB camera. The sensitivity of the MEMS array is improved by using the channel data with higher sensitivity for each MEMS detector under a thermal load.

Original languageEnglish
Title of host publication2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Proceedings
PublisherIEEE
Pages169-170
Number of pages2
ISBN (Electronic)9780992841423
ISBN (Print)9780992841409
DOIs
Publication statusPublished - 16 Oct 2014
Externally publishedYes
Event2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Glasgow, United Kingdom
Duration: 17 Aug 201421 Aug 2014

Conference

Conference2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014
CountryUnited Kingdom
CityGlasgow
Period17/08/1421/08/14

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