Simultaneous two-wavelength readout for thermo-mechanical MEMS detectors

Ulas Adiyan; Fehmi Civitci; Refik Burak Erarslan; Onur Ferhanoglu; Hamdi Torun; Hakan Urey

doi:10.1109/OMN.2014.6924576

Simultaneous two-wavelength readout for thermo-mechanical MEMS detectors

Ulas Adiyan^*, Fehmi Civitci, Refik Burak Erarslan, Onur Ferhanoglu, Hamdi Torun, Hakan Urey

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

2 Citations (Scopus)

Abstract

We proposed a novel two-wavelength optical readout for grating based thermo-mechanical MEMS arrays by using two color LEDS butt-coupled to a multi-mode fiber, which provides spatial auto-registration of two different color images on a single camera. The -1st diffraction orders of the different colors are simultaneously monitored with different channels (R and G) of the RGB camera. The sensitivity of the MEMS array is improved by using the channel data with higher sensitivity for each MEMS detector under a thermal load.

Original language	English
Title of host publication	2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Proceedings
Publisher	IEEE
Pages	169-170
Number of pages	2
ISBN (Electronic)	9780992841423
ISBN (Print)	9780992841409
DOIs	https://doi.org/10.1109/OMN.2014.6924576
Publication status	Published - 16 Oct 2014
Externally published	Yes
Event	2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Glasgow, United Kingdom Duration: 17 Aug 2014 → 21 Aug 2014

Conference

Conference	2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014
Country/Territory	United Kingdom
City	Glasgow
Period	17/08/14 → 21/08/14

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10.1109/OMN.2014.6924576

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@inproceedings{05dda996d86240ddac895dbc13cdcd45,

title = "Simultaneous two-wavelength readout for thermo-mechanical MEMS detectors",

abstract = "We proposed a novel two-wavelength optical readout for grating based thermo-mechanical MEMS arrays by using two color LEDS butt-coupled to a multi-mode fiber, which provides spatial auto-registration of two different color images on a single camera. The -1st diffraction orders of the different colors are simultaneously monitored with different channels (R and G) of the RGB camera. The sensitivity of the MEMS array is improved by using the channel data with higher sensitivity for each MEMS detector under a thermal load.",

author = "Ulas Adiyan and Fehmi Civitci and Erarslan, {Refik Burak} and Onur Ferhanoglu and Hamdi Torun and Hakan Urey",

year = "2014",

month = oct,

day = "16",

doi = "10.1109/OMN.2014.6924576",

language = "English",

isbn = "9780992841409",

pages = "169--170",

booktitle = "2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Proceedings",

publisher = "IEEE",

address = "United States",

note = "2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 ; Conference date: 17-08-2014 Through 21-08-2014",

}

Adiyan, U, Civitci, F, Erarslan, RB, Ferhanoglu, O, Torun, H & Urey, H 2014, Simultaneous two-wavelength readout for thermo-mechanical MEMS detectors. in 2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Proceedings. IEEE, pp. 169-170, 2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014, Glasgow, United Kingdom, 17/08/14. https://doi.org/10.1109/OMN.2014.6924576

TY - GEN

T1 - Simultaneous two-wavelength readout for thermo-mechanical MEMS detectors

AU - Adiyan, Ulas

AU - Civitci, Fehmi

AU - Erarslan, Refik Burak

AU - Ferhanoglu, Onur

AU - Torun, Hamdi

AU - Urey, Hakan

PY - 2014/10/16

Y1 - 2014/10/16

N2 - We proposed a novel two-wavelength optical readout for grating based thermo-mechanical MEMS arrays by using two color LEDS butt-coupled to a multi-mode fiber, which provides spatial auto-registration of two different color images on a single camera. The -1st diffraction orders of the different colors are simultaneously monitored with different channels (R and G) of the RGB camera. The sensitivity of the MEMS array is improved by using the channel data with higher sensitivity for each MEMS detector under a thermal load.

AB - We proposed a novel two-wavelength optical readout for grating based thermo-mechanical MEMS arrays by using two color LEDS butt-coupled to a multi-mode fiber, which provides spatial auto-registration of two different color images on a single camera. The -1st diffraction orders of the different colors are simultaneously monitored with different channels (R and G) of the RGB camera. The sensitivity of the MEMS array is improved by using the channel data with higher sensitivity for each MEMS detector under a thermal load.

U2 - 10.1109/OMN.2014.6924576

DO - 10.1109/OMN.2014.6924576

M3 - Conference contribution

AN - SCOPUS:84908032873

SN - 9780992841409

SP - 169

EP - 170

BT - 2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Proceedings

PB - IEEE

T2 - 2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014

Y2 - 17 August 2014 through 21 August 2014

ER -

Simultaneous two-wavelength readout for thermo-mechanical MEMS detectors

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