A digital variable capacitor has been designed and fabricated based on multi-cantilevers of doped nanocrystalline silicon with variable lengths, suspended over a bottom electrode on top of a high-k material, HfO2, to increase the tuning range of the capacitance. By applying a voltage between the electrodes, the electrostatic force pulls the beams in one-by-one, realizing a digital increase in capacitance. These devices were fabricated using a 4-mask process, and electrical tests confirmed the stepwise increase of the capacitance with voltage from the multi-cantilever digital capacitors.
|Publication status||Published - Jan 2016|
|Event||IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) - Shanghai|
Duration: 1 Jan 2016 → …
|Conference||IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)|
|Period||1/01/16 → …|