Sputtered ZnO film on aluminium foils for flexible ultrasonic transducers

X. S. Zhou; Chao Zhao; Ruozhou Hou; Jia Zhang; Katherine Kirk; David Hutson; Yuanjun Guo; Ping An Hu; Shuming Peng; Xiao-Tao Zu; Yong Qing Fu

doi:10.1016/j.ultras.2014.05.006

Sputtered ZnO film on aluminium foils for flexible ultrasonic transducers

X. S. Zhou, Chao Zhao, Ruozhou Hou, Jia Zhang, Katherine Kirk, David Hutson, Yuanjun Guo, Ping An Hu, Shuming Peng, Xiao-Tao Zu, Yong Qing Fu

Research output: Contribution to journal › Article › peer-review

34 Citations (Scopus)

Abstract

Nanocrystalline ZnO films with both C-axis vertical grown and inclined angled grown were sputter-deposited onto aluminium foils (50 μm thick) and characterised for using as flexible ultrasonic transducers. As-deposited C-axis grown ZnO films were annealed at different temperatures up to 600 °C to enhance film crystallinity and reduce film stress. The C-axis grown ZnO film on the Al foil were bonded onto steel plates, and the pulse-echo tests verified a good performance (with dominant longitudinal waves) of the ultrasonic transducers made from both as-deposited and post-annealed films. Inclined angled ZnO films on the Al foil glued onto steel plates generated mixed shear and longitudinal waves in the pulse-echo test.

Original language	English
Pages (from-to)	1991-1998
Journal	Ultrasonics
Volume	54
Issue number	7
DOIs	https://doi.org/10.1016/j.ultras.2014.05.006
Publication status	Published - Sept 2014

Keywords

ZnO film
annealing
flexible ultrasonic transducer
pulse-echo
ultrasonic wave

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10.1016/j.ultras.2014.05.006

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title = "Sputtered ZnO film on aluminium foils for flexible ultrasonic transducers",

abstract = "Nanocrystalline ZnO films with both C-axis vertical grown and inclined angled grown were sputter-deposited onto aluminium foils (50 μm thick) and characterised for using as flexible ultrasonic transducers. As-deposited C-axis grown ZnO films were annealed at different temperatures up to 600 °C to enhance film crystallinity and reduce film stress. The C-axis grown ZnO film on the Al foil were bonded onto steel plates, and the pulse-echo tests verified a good performance (with dominant longitudinal waves) of the ultrasonic transducers made from both as-deposited and post-annealed films. Inclined angled ZnO films on the Al foil glued onto steel plates generated mixed shear and longitudinal waves in the pulse-echo test.",

keywords = "ZnO film, annealing, flexible ultrasonic transducer, pulse-echo, ultrasonic wave",

author = "Zhou, \{X. S.\} and Chao Zhao and Ruozhou Hou and Jia Zhang and Katherine Kirk and David Hutson and Yuanjun Guo and Hu, \{Ping An\} and Shuming Peng and Xiao-Tao Zu and Fu, \{Yong Qing\}",

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T1 - Sputtered ZnO film on aluminium foils for flexible ultrasonic transducers

AU - Zhou, X. S.

AU - Zhao, Chao

AU - Hou, Ruozhou

AU - Zhang, Jia

AU - Kirk, Katherine

AU - Hutson, David

AU - Guo, Yuanjun

AU - Hu, Ping An

AU - Peng, Shuming

AU - Zu, Xiao-Tao

AU - Fu, Yong Qing

PY - 2014/9

Y1 - 2014/9

N2 - Nanocrystalline ZnO films with both C-axis vertical grown and inclined angled grown were sputter-deposited onto aluminium foils (50 μm thick) and characterised for using as flexible ultrasonic transducers. As-deposited C-axis grown ZnO films were annealed at different temperatures up to 600 °C to enhance film crystallinity and reduce film stress. The C-axis grown ZnO film on the Al foil were bonded onto steel plates, and the pulse-echo tests verified a good performance (with dominant longitudinal waves) of the ultrasonic transducers made from both as-deposited and post-annealed films. Inclined angled ZnO films on the Al foil glued onto steel plates generated mixed shear and longitudinal waves in the pulse-echo test.

AB - Nanocrystalline ZnO films with both C-axis vertical grown and inclined angled grown were sputter-deposited onto aluminium foils (50 μm thick) and characterised for using as flexible ultrasonic transducers. As-deposited C-axis grown ZnO films were annealed at different temperatures up to 600 °C to enhance film crystallinity and reduce film stress. The C-axis grown ZnO film on the Al foil were bonded onto steel plates, and the pulse-echo tests verified a good performance (with dominant longitudinal waves) of the ultrasonic transducers made from both as-deposited and post-annealed films. Inclined angled ZnO films on the Al foil glued onto steel plates generated mixed shear and longitudinal waves in the pulse-echo test.

KW - ZnO film

KW - annealing

KW - flexible ultrasonic transducer

KW - pulse-echo

KW - ultrasonic wave

UR - https://www.scopus.com/pages/publications/84905188585

U2 - 10.1016/j.ultras.2014.05.006

DO - 10.1016/j.ultras.2014.05.006

M3 - Article

SN - 0041-624X

VL - 54

SP - 1991

EP - 1998

JO - Ultrasonics

JF - Ultrasonics

IS - 7

ER -

Sputtered ZnO film on aluminium foils for flexible ultrasonic transducers

Abstract

Keywords

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