Strategy to Minimize Bending Strain Interference for Flexible Acoustic Wave Sensing Platform

Jian Zhou, Zhangbin Ji, Yihao Guo, Yanghui Liu, Fengling Zhou, Yuanjin Zheng, Yuandong Gu, Yongqing (Richard) Fu, Huigao Duan*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

7 Citations (Scopus)
5 Downloads (Pure)

Abstract

There are great concerns for sensing using flexible acoustic wave sensors and labon-a-chip, as mechanical strains will dramatically change the sensing signals (e.g., frequency) when they are bent during measurements. These strain-induced signal changes cannot be easily separated from those of real sensing signals (e.g., humidity, ultraviolet, or gas/biological molecules). Herein, we proposed a new strategy to minimize/eliminate effects of mechanical bending strains by optimizing off-axis angles between the direction of bending deformation and propagation of acoustic waves on curved surfaces of layered piezoelectric film/flexible glass structure. This strategy has theoretically been proved by optimization of bending designs of offaxis angles and acoustically elastic effect. Proof-of-concept for humidity and ultraviolet-light sensing using flexible SAW devices with negligible interferences are achieved within a wide range of bending strains. This work provides the best solution for achieving high performance flexible acoustic wave sensors under deformed/bending conditions.
Original languageEnglish
Article number84
Number of pages9
Journalnpj Flexible Electronics
Volume6
Issue number1
DOIs
Publication statusPublished - 22 Sept 2022

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