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Stress and Crystallization of Plasma Enhanced Chemical Vapour Deposition Nanocrystalline Silicon Films

S. B. Milne, Yong Qing Fu, Jikui Luo, Andrew Flewitt, Simon Pisana, Andrea Fasoli, William Milne

    Research output: Contribution to journal › Article › peer-review

    6 Citations (Scopus)

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