Surface acoustic wave ammonia sensor based on ZnS mucosal-like nanostructures

Gongdi Long, Yuanjun Guo, Wei Li, Qingbo Tang, Xiaotao Zu, Jinyi Ma, Bo Du, Yongqing Fu

Research output: Contribution to journalReview articlepeer-review

5 Citations (Scopus)
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Abstract

Mucosal-like ZnS nanostructures were synthesized on surface of ST-cut quartz surface acoustic wave (SAW) device using a chemical bath deposition method for ammonia sensing applications. Results showed the SAW device with ZnS mucosal nanostructures achieved a good sensitivity, e.g., with a frequency shift of ~190 Hz upon exposure to 1 ppm ammonia gas. This is mainly attributed to the large specific surface areas and more active sites on the surfaces of the ZnS mucosal nanostructures. Selectivity of the SAW device with the ZnS mucosal nanostructure for ammonia sensing was excellent in comparisons with those for other types of gases such as hydrogen sulfide, hydrogen, nitrogen dioxide, carbon monoxide and ethanol.
Original languageEnglish
Article number111201
Number of pages7
JournalMicroelectronic Engineering
Volume222
Early online date18 Dec 2019
DOIs
Publication statusPublished - 1 Feb 2020

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