Abstract
Mucosal-like ZnS nanostructures were synthesized on surface of ST-cut quartz surface acoustic wave (SAW) device using a chemical bath deposition method for ammonia sensing applications. Results showed the SAW device with ZnS mucosal nanostructures achieved a good sensitivity, e.g., with a frequency shift of ~190 Hz upon exposure to 1 ppm ammonia gas. This is mainly attributed to the large specific surface areas and more active sites on the surfaces of the ZnS mucosal nanostructures. Selectivity of the SAW device with the ZnS mucosal nanostructure for ammonia sensing was excellent in comparisons with those for other types of gases such as hydrogen sulfide, hydrogen, nitrogen dioxide, carbon monoxide and ethanol.
Original language | English |
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Article number | 111201 |
Number of pages | 7 |
Journal | Microelectronic Engineering |
Volume | 222 |
Early online date | 18 Dec 2019 |
DOIs | |
Publication status | Published - 1 Feb 2020 |
Keywords
- Mucosa
- ZnS nanostructure
- Surface acoustic wave
- Gas sensor