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Surface acoustic wave ammonia sensor based on ZnS mucosal-like nanostructures

Gongdi Long, Yuanjun Guo, Wei Li, Qingbo Tang, Xiaotao Zu, Jinyi Ma, Bo Du, Yongqing Fu

    Research output: Contribution to journalReview articlepeer-review

    30 Citations (Scopus)
    33 Downloads (Pure)

    Abstract

    Mucosal-like ZnS nanostructures were synthesized on surface of ST-cut quartz surface acoustic wave (SAW) device using a chemical bath deposition method for ammonia sensing applications. Results showed the SAW device with ZnS mucosal nanostructures achieved a good sensitivity, e.g., with a frequency shift of ~190 Hz upon exposure to 1 ppm ammonia gas. This is mainly attributed to the large specific surface areas and more active sites on the surfaces of the ZnS mucosal nanostructures. Selectivity of the SAW device with the ZnS mucosal nanostructure for ammonia sensing was excellent in comparisons with those for other types of gases such as hydrogen sulfide, hydrogen, nitrogen dioxide, carbon monoxide and ethanol.
    Original languageEnglish
    Article number111201
    Number of pages7
    JournalMicroelectronic Engineering
    Volume222
    Early online date18 Dec 2019
    DOIs
    Publication statusPublished - 1 Feb 2020

    Keywords

    • Mucosa
    • ZnS nanostructure
    • Surface acoustic wave
    • Gas sensor

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