Surface acoustic wave devices with graphene interdigitated transducers

Jian Zhou; Xianglong Shi; Dingbang Xiao; Xuezhong Wu; Jiangpo Zheng; Jikui Luo; Xiang Tao; Hao Jin; Shurong Dong; Ran Tao; Huigao Duan; Yong Qing Fu

doi:10.1088/1361-6439/aaee61

Surface acoustic wave devices with graphene interdigitated transducers

Jian Zhou, Xianglong Shi, Dingbang Xiao, Xuezhong Wu, Jiangpo Zheng, Jikui Luo, Xiang Tao, Hao Jin, Shurong Dong, Ran Tao, Huigao Duan, Yong Qing Fu

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Abstract

This paper reports the development of high performance surface acoustic wave (SAW) devices by using graphene as a virtually massless interdigital transducer (IDT) to mitigate mass-loading effects. Different layers of graphene electrodes were made and their influences on the SAW device performance were experimentally and theoretically evaluated. Results showed that 4-layer graphene with a value of sheet resistance less than 77.6 Ω/sq. and graphene IDTs of at least 80 pairs are needed to obtain the optimum performance of graphene IDT SAW devices. Furthermore, the optimal ratio of aperture/wavelength for the graphene IDT electrode was found to be 5. Graphene based SAW devices, with a resonance frequency of 154 MHz, transmission signal amplitude of 30 dB and K2 of 3.78%, were fabricated and successfully demonstrated for applications in breathing monitoring.

Original language	English
Article number	015006
Journal	Journal of Micromechanics and Microengineering
Volume	29
Issue number	1
Early online date	26 Nov 2018
DOIs	https://doi.org/10.1088/1361-6439/aaee61
Publication status	Published - 1 Jan 2019

Keywords

geometry effects
graphene IDTs
SAW
sensors
sheet resistance

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10.1088/1361-6439/aaee61

JMM revisied ManuscriptAccepted author manuscript, 1.65 MB

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title = "Surface acoustic wave devices with graphene interdigitated transducers",

abstract = "This paper reports the development of high performance surface acoustic wave (SAW) devices by using graphene as a virtually massless interdigital transducer (IDT) to mitigate mass-loading effects. Different layers of graphene electrodes were made and their influences on the SAW device performance were experimentally and theoretically evaluated. Results showed that 4-layer graphene with a value of sheet resistance less than 77.6 Ω/sq. and graphene IDTs of at least 80 pairs are needed to obtain the optimum performance of graphene IDT SAW devices. Furthermore, the optimal ratio of aperture/wavelength for the graphene IDT electrode was found to be 5. Graphene based SAW devices, with a resonance frequency of 154 MHz, transmission signal amplitude of 30 dB and K2 of 3.78\%, were fabricated and successfully demonstrated for applications in breathing monitoring.",

keywords = "geometry effects, graphene IDTs, SAW, sensors, sheet resistance",

author = "Jian Zhou and Xianglong Shi and Dingbang Xiao and Xuezhong Wu and Jiangpo Zheng and Jikui Luo and Xiang Tao and Hao Jin and Shurong Dong and Ran Tao and Huigao Duan and Fu, \{Yong Qing\}",

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AU - Zhou, Jian

AU - Shi, Xianglong

AU - Xiao, Dingbang

AU - Wu, Xuezhong

AU - Zheng, Jiangpo

AU - Luo, Jikui

AU - Tao, Xiang

AU - Jin, Hao

AU - Dong, Shurong

AU - Tao, Ran

AU - Duan, Huigao

AU - Fu, Yong Qing

PY - 2019/1/1

Y1 - 2019/1/1

N2 - This paper reports the development of high performance surface acoustic wave (SAW) devices by using graphene as a virtually massless interdigital transducer (IDT) to mitigate mass-loading effects. Different layers of graphene electrodes were made and their influences on the SAW device performance were experimentally and theoretically evaluated. Results showed that 4-layer graphene with a value of sheet resistance less than 77.6 Ω/sq. and graphene IDTs of at least 80 pairs are needed to obtain the optimum performance of graphene IDT SAW devices. Furthermore, the optimal ratio of aperture/wavelength for the graphene IDT electrode was found to be 5. Graphene based SAW devices, with a resonance frequency of 154 MHz, transmission signal amplitude of 30 dB and K2 of 3.78%, were fabricated and successfully demonstrated for applications in breathing monitoring.

AB - This paper reports the development of high performance surface acoustic wave (SAW) devices by using graphene as a virtually massless interdigital transducer (IDT) to mitigate mass-loading effects. Different layers of graphene electrodes were made and their influences on the SAW device performance were experimentally and theoretically evaluated. Results showed that 4-layer graphene with a value of sheet resistance less than 77.6 Ω/sq. and graphene IDTs of at least 80 pairs are needed to obtain the optimum performance of graphene IDT SAW devices. Furthermore, the optimal ratio of aperture/wavelength for the graphene IDT electrode was found to be 5. Graphene based SAW devices, with a resonance frequency of 154 MHz, transmission signal amplitude of 30 dB and K2 of 3.78%, were fabricated and successfully demonstrated for applications in breathing monitoring.

KW - geometry effects

KW - graphene IDTs

KW - SAW

KW - sensors

KW - sheet resistance

UR - https://www.scopus.com/pages/publications/85059168507

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DO - 10.1088/1361-6439/aaee61

M3 - Article

SN - 0960-1317

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JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

IS - 1

M1 - 015006

ER -

Surface acoustic wave devices with graphene interdigitated transducers

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