There is an increase in demand for durable and efficient organic nanoscale coatings for modern manufacturing systems or components for various applications. Due to this call, a new superhydrophobic silane compound was developed and deposited on mild steel, stainless steel and titanium substrates to determine its durability. The substrates are pretreated with alumina, and the coatings are deposited via the atomic layer deposition (ALD) method. The three substrates were considered for evolving properties comparison and determination of the substrates’ response to the film’s mechanical properties. The mechanical properties and the failure mechanics were investigated using nanoindentation and nanoscratch. The mechanical viability indicated that stainless steel showed the most robust properties compared with other substrates. Therefore, a nanoscale coating’s mechanical strength can be influenced by the substrate’s material compositions.