Temperature and RF Power Effect on the Morphology and Structural Properties of TiC Thin Film Grown by RF Magnetron Sputtering

Olayinka Oluwatosin Abegunde; Esther Titilayo Akinlabi; Oluseyi Philip Oladijo

doi:10.1007/978-981-15-4745-4_51

Temperature and RF Power Effect on the Morphology and Structural Properties of TiC Thin Film Grown by RF Magnetron Sputtering

Olayinka Oluwatosin Abegunde^*, Esther Titilayo Akinlabi, Oluseyi Philip Oladijo

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

In this research study, the effect of temperature and radio frequency (RF) power on the surface morphology and structural properties of titanium carbide (TiC) thin film was studied. TiC thin film was deposited on the surface of commercially pure titanium (CpTi) alloys to enhance its surface properties. During the deposition process, the sputtering temperature and RF power were varied while other sputtering parameters were kept constant. Field emission scanning electron microscope was used to analyze the surface profiling of the film, and atomic force microscope was used to study the surface roughness. Raman spectroscopy was used to determine the film composition, and grazing incidence X-ray diffractometer was used to analyze the phase composition. Nanoindentation was carried out to understand the hardness and Young’s modulus properties of the coating. The results reveal the dependency of the thin film properties on the independent process parameters.

Original language	English
Title of host publication	Trends in Manufacturing and Engineering Management
Subtitle of host publication	Select Proceedings of ICMechD 2019
Editors	S. Vijayan, Nachiappan Subramanian, K. Sankaranarayanasamy
Place of Publication	Singapore, Asia
Publisher	Springer
Pages	583-590
Number of pages	8
Edition	1st
ISBN (Electronic)	9789811547454
ISBN (Print)	9789811547447
DOIs	https://doi.org/10.1007/978-981-15-4745-4_51
Publication status	Published - 20 Aug 2020
Externally published	Yes
Event	2nd International Conference on Mechanical Engineering Design, ICMechD 2019 - Chennai, India Duration: 25 Apr 2019 → 26 Apr 2019

Publication series

Name	Lecture Notes in Mechanical Engineering (LNME)
Publisher	Springer
ISSN (Print)	2195-4356
ISSN (Electronic)	2195-4364

Conference

Conference	2nd International Conference on Mechanical Engineering Design, ICMechD 2019
Country/Territory	India
City	Chennai
Period	25/04/19 → 26/04/19

Keywords

RF power
Temperature
Thin film
TiC

Access to Document

10.1007/978-981-15-4745-4_51

https://sites.google.com/ssn.edu.in/icmechd/publication

Cite this

Abegunde, O. O., Akinlabi, E. T., & Oladijo, O. P. (2020). Temperature and RF Power Effect on the Morphology and Structural Properties of TiC Thin Film Grown by RF Magnetron Sputtering. In S. Vijayan, N. Subramanian, & K. Sankaranarayanasamy (Eds.), Trends in Manufacturing and Engineering Management: Select Proceedings of ICMechD 2019 (1st ed., pp. 583-590). (Lecture Notes in Mechanical Engineering (LNME)). Springer. https://doi.org/10.1007/978-981-15-4745-4_51

Abegunde, Olayinka Oluwatosin ; Akinlabi, Esther Titilayo ; Oladijo, Oluseyi Philip. / Temperature and RF Power Effect on the Morphology and Structural Properties of TiC Thin Film Grown by RF Magnetron Sputtering. Trends in Manufacturing and Engineering Management: Select Proceedings of ICMechD 2019. editor / S. Vijayan ; Nachiappan Subramanian ; K. Sankaranarayanasamy. 1st. ed. Singapore, Asia : Springer, 2020. pp. 583-590 (Lecture Notes in Mechanical Engineering (LNME)).

@inproceedings{eb63cbde2b9a4ffd87755e585def3abc,

title = "Temperature and RF Power Effect on the Morphology and Structural Properties of TiC Thin Film Grown by RF Magnetron Sputtering",

abstract = "In this research study, the effect of temperature and radio frequency (RF) power on the surface morphology and structural properties of titanium carbide (TiC) thin film was studied. TiC thin film was deposited on the surface of commercially pure titanium (CpTi) alloys to enhance its surface properties. During the deposition process, the sputtering temperature and RF power were varied while other sputtering parameters were kept constant. Field emission scanning electron microscope was used to analyze the surface profiling of the film, and atomic force microscope was used to study the surface roughness. Raman spectroscopy was used to determine the film composition, and grazing incidence X-ray diffractometer was used to analyze the phase composition. Nanoindentation was carried out to understand the hardness and Young{\textquoteright}s modulus properties of the coating. The results reveal the dependency of the thin film properties on the independent process parameters.",

keywords = "RF power, Temperature, Thin film, TiC",

author = "Abegunde, {Olayinka Oluwatosin} and Akinlabi, {Esther Titilayo} and Oladijo, {Oluseyi Philip}",

note = "Funding Information: Acknowledgements The authors will like to acknowledge CSIR South African and the University of Johannesburg for funding this project. Publisher Copyright: {\textcopyright} 2021, Springer Nature Singapore Pte Ltd.; 2nd International Conference on Mechanical Engineering Design, ICMechD 2019 ; Conference date: 25-04-2019 Through 26-04-2019",

year = "2020",

month = aug,

day = "20",

doi = "10.1007/978-981-15-4745-4_51",

language = "English",

isbn = "9789811547447",

series = "Lecture Notes in Mechanical Engineering (LNME)",

publisher = "Springer",

pages = "583--590",

editor = "S. Vijayan and Nachiappan Subramanian and K. Sankaranarayanasamy",

booktitle = "Trends in Manufacturing and Engineering Management",

address = "Germany",

edition = "1st",

}

Abegunde, OO, Akinlabi, ET & Oladijo, OP 2020, Temperature and RF Power Effect on the Morphology and Structural Properties of TiC Thin Film Grown by RF Magnetron Sputtering. in S Vijayan, N Subramanian & K Sankaranarayanasamy (eds), Trends in Manufacturing and Engineering Management: Select Proceedings of ICMechD 2019. 1st edn, Lecture Notes in Mechanical Engineering (LNME), Springer, Singapore, Asia, pp. 583-590, 2nd International Conference on Mechanical Engineering Design, ICMechD 2019, Chennai, India, 25/04/19. https://doi.org/10.1007/978-981-15-4745-4_51

Temperature and RF Power Effect on the Morphology and Structural Properties of TiC Thin Film Grown by RF Magnetron Sputtering. / Abegunde, Olayinka Oluwatosin; Akinlabi, Esther Titilayo; Oladijo, Oluseyi Philip.
Trends in Manufacturing and Engineering Management: Select Proceedings of ICMechD 2019. ed. / S. Vijayan; Nachiappan Subramanian; K. Sankaranarayanasamy. 1st. ed. Singapore, Asia: Springer, 2020. p. 583-590 (Lecture Notes in Mechanical Engineering (LNME)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Temperature and RF Power Effect on the Morphology and Structural Properties of TiC Thin Film Grown by RF Magnetron Sputtering

AU - Abegunde, Olayinka Oluwatosin

AU - Akinlabi, Esther Titilayo

AU - Oladijo, Oluseyi Philip

N1 - Funding Information: Acknowledgements The authors will like to acknowledge CSIR South African and the University of Johannesburg for funding this project. Publisher Copyright: © 2021, Springer Nature Singapore Pte Ltd.

PY - 2020/8/20

Y1 - 2020/8/20

N2 - In this research study, the effect of temperature and radio frequency (RF) power on the surface morphology and structural properties of titanium carbide (TiC) thin film was studied. TiC thin film was deposited on the surface of commercially pure titanium (CpTi) alloys to enhance its surface properties. During the deposition process, the sputtering temperature and RF power were varied while other sputtering parameters were kept constant. Field emission scanning electron microscope was used to analyze the surface profiling of the film, and atomic force microscope was used to study the surface roughness. Raman spectroscopy was used to determine the film composition, and grazing incidence X-ray diffractometer was used to analyze the phase composition. Nanoindentation was carried out to understand the hardness and Young’s modulus properties of the coating. The results reveal the dependency of the thin film properties on the independent process parameters.

AB - In this research study, the effect of temperature and radio frequency (RF) power on the surface morphology and structural properties of titanium carbide (TiC) thin film was studied. TiC thin film was deposited on the surface of commercially pure titanium (CpTi) alloys to enhance its surface properties. During the deposition process, the sputtering temperature and RF power were varied while other sputtering parameters were kept constant. Field emission scanning electron microscope was used to analyze the surface profiling of the film, and atomic force microscope was used to study the surface roughness. Raman spectroscopy was used to determine the film composition, and grazing incidence X-ray diffractometer was used to analyze the phase composition. Nanoindentation was carried out to understand the hardness and Young’s modulus properties of the coating. The results reveal the dependency of the thin film properties on the independent process parameters.

KW - RF power

KW - Temperature

KW - Thin film

KW - TiC

UR - http://www.scopus.com/inward/record.url?scp=85090539168&partnerID=8YFLogxK

U2 - 10.1007/978-981-15-4745-4_51

DO - 10.1007/978-981-15-4745-4_51

M3 - Conference contribution

AN - SCOPUS:85090539168

SN - 9789811547447

T3 - Lecture Notes in Mechanical Engineering (LNME)

SP - 583

EP - 590

BT - Trends in Manufacturing and Engineering Management

A2 - Vijayan, S.

A2 - Subramanian, Nachiappan

A2 - Sankaranarayanasamy, K.

PB - Springer

CY - Singapore, Asia

T2 - 2nd International Conference on Mechanical Engineering Design, ICMechD 2019

Y2 - 25 April 2019 through 26 April 2019

ER -

Abegunde OO, Akinlabi ET, Oladijo OP. Temperature and RF Power Effect on the Morphology and Structural Properties of TiC Thin Film Grown by RF Magnetron Sputtering. In Vijayan S, Subramanian N, Sankaranarayanasamy K, editors, Trends in Manufacturing and Engineering Management: Select Proceedings of ICMechD 2019. 1st ed. Singapore, Asia: Springer. 2020. p. 583-590. (Lecture Notes in Mechanical Engineering (LNME)). Epub 2020 Aug 19. doi: 10.1007/978-981-15-4745-4_51

Temperature and RF Power Effect on the Morphology and Structural Properties of TiC Thin Film Grown by RF Magnetron Sputtering

Abstract

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Keywords

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