Test structure and measurement system for characterising the electrochemical performance of nanoelectrode structures

Ilka Schmueser, Ewen Blair, Ziya Isiksacan, Yifan Li, Damion Corrigan, Adam Stokes, Jonathan Terry, Andrew Mount, Anthony Walton

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Abstract

This paper presents a complete test structure and characterisation system for the evaluation of nanoelectrode technology. It integrates microfabricated nanoelectrodes for electrochemical measurements, 3D printing and surface tensionconfined microfluidics. This system exploits the inherent analytical advantages of nanoelectrodes that enables their operation with small volume samples, which has potential applications for onwafer measurements.
Original languageEnglish
Title of host publication2020 IEEE 33rd International Conference on Microelectronic Test Structures (ICMTS)
Place of PublicationPiscataway, NJ
PublisherIEEE
Chapter4.4
Number of pages6
ISBN (Electronic)9781728140087
DOIs
Publication statusPublished - May 2020
Event2020 IEEE 33rd International Conference on Microelectronic Test Structures - Edinburgh, United Kingdom
Duration: 4 May 202018 May 2020
https://ieeexplore.ieee.org/xpl/conhome/9104792/proceeding

Conference

Conference2020 IEEE 33rd International Conference on Microelectronic Test Structures
Abbreviated titleIEEE ICMTS 2020
Country/TerritoryUnited Kingdom
CityEdinburgh
Period4/05/2018/05/20
Internet address

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