Abstract
This paper presents a complete test structure and characterisation system for the evaluation of nanoelectrode technology. It integrates microfabricated nanoelectrodes for electrochemical measurements, 3D printing and surface tensionconfined microfluidics. This system exploits the inherent analytical advantages of nanoelectrodes that enables their operation with small volume samples, which has potential applications for onwafer measurements.
Original language | English |
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Title of host publication | 2020 IEEE 33rd International Conference on Microelectronic Test Structures (ICMTS) |
Place of Publication | Piscataway, NJ |
Publisher | IEEE |
Chapter | 4.4 |
Number of pages | 6 |
ISBN (Electronic) | 9781728140087 |
DOIs | |
Publication status | Published - May 2020 |
Event | 2020 IEEE 33rd International Conference on Microelectronic Test Structures - Edinburgh, United Kingdom Duration: 4 May 2020 → 18 May 2020 https://ieeexplore.ieee.org/xpl/conhome/9104792/proceeding |
Conference
Conference | 2020 IEEE 33rd International Conference on Microelectronic Test Structures |
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Abbreviated title | IEEE ICMTS 2020 |
Country/Territory | United Kingdom |
City | Edinburgh |
Period | 4/05/20 → 18/05/20 |
Internet address |