Test structure and measurement system for characterising the electrochemical performance of nanoelectrode structures

Ilka Schmueser, Ewen Blair, Ziya Isiksacan, Yifan Li, Damion Corrigan, Adam Stokes, Jonathan Terry, Andrew Mount, Anthony Walton

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    Abstract

    This paper presents a complete test structure and characterisation system for the evaluation of nanoelectrode technology. It integrates microfabricated nanoelectrodes for electrochemical measurements, 3D printing and surface tensionconfined microfluidics. This system exploits the inherent analytical advantages of nanoelectrodes that enables their operation with small volume samples, which has potential applications for onwafer measurements.
    Original languageEnglish
    Title of host publication2020 IEEE 33rd International Conference on Microelectronic Test Structures (ICMTS)
    Place of PublicationPiscataway, NJ
    PublisherIEEE
    Chapter4.4
    Number of pages6
    ISBN (Electronic)9781728140087
    DOIs
    Publication statusPublished - May 2020
    Event2020 IEEE 33rd International Conference on Microelectronic Test Structures - Edinburgh, United Kingdom
    Duration: 4 May 202018 May 2020
    https://ieeexplore.ieee.org/xpl/conhome/9104792/proceeding

    Conference

    Conference2020 IEEE 33rd International Conference on Microelectronic Test Structures
    Abbreviated titleIEEE ICMTS 2020
    Country/TerritoryUnited Kingdom
    CityEdinburgh
    Period4/05/2018/05/20
    Internet address

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