Test structure for characterising low voltage coplanar EWOD system

Yifan Li*, Mita Yoshio, Les Haworth, William Parkes, Masanori Kubota, Anthony Walton

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Citation (Scopus)

Abstract

This paper presents test structures designed for studying the relationship between the operation voltage and the configuration of electrode area for coplanar EWOD (ElectroWetting On Dielectrics) devices. Robust anodic Ta 2O5 dielectric and thin aFP (amorphous Fluoropolymer) have been used to fabricate the structures. Test structures have been used to characterise the significant contact angle change on asymmetric configurations, 114° to 81° on CYTOP (amorphous fluoropolymer from Asahi Glass Co. Ltd.) with an applied voltage of less than 20V. This demonstrates that by modifying the design, the operating voltage can be reduced by a factor of two, compared to the existing symmetric coplanar EWOD structures. Droplet manipulation on a coplanar EWOD system with this new design has been successfully demonstrated, with a driving voltage of 15V.

Original languageEnglish
Title of host publication2008 IEEE Conference on Microelectronic Test Structures, ICMTS
Pages80-85
Number of pages6
DOIs
Publication statusPublished - 15 Sep 2008
Externally publishedYes
Event2008 IEEE Conference on Microelectronic Test Structures, ICMTS - Edinburgh, United Kingdom
Duration: 24 Mar 200827 Mar 2008

Publication series

NameIEEE International Conference on Microelectronic Test Structures

Conference

Conference2008 IEEE Conference on Microelectronic Test Structures, ICMTS
CountryUnited Kingdom
CityEdinburgh
Period24/03/0827/03/08

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